Quantification of interfacial roughness of In2O3/ZrO2 superlattice films in 3D

X. Y. Zhong, B. Kabius, D. K. Schreiber, J. A. Eastman, D. D. Fong, A. K. Petford-Long

Research output: Contribution to journalArticlepeer-review

2 Scopus citations
Original languageEnglish (US)
Pages (from-to)600-601
Number of pages2
JournalMicroscopy and Microanalysis
Volume15
Issue numberSUPPL. 2
DOIs
StatePublished - Jul 2009

Funding

References [1] L.J. Gauckler and K. Sasaki, Solid St. Ionics 75 (1995) 203. [2] This research was supported by the US Department of Energy, BES-Materials Sciences under contact number 58931 and 58932. This work was accomplished at the Electron Microscopy Center for Materials Research at Argonne National Laboratory, a U.S. Department of Energy Office of Science Laboratory operated under Contract No. DE-AC02-06CH11357 by UChicago Argonne, LLC. The help of Dr. Yuzi Liu and Jon Hiller at Argonne National Laboratory and Dr. Fang Lin at South China Agricultural University are gratefully acknowledged.

ASJC Scopus subject areas

  • Instrumentation

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