Quantification of interfacial roughness of In2O3/ZrO2 superlattice films in 3D

X. Y. Zhong, B. Kabius, D. K. Schreiber, J. A. Eastman, D. D. Fong, A. K. Petford-Long

Research output: Contribution to journalArticle

1 Scopus citations
Original languageEnglish (US)
Pages (from-to)600-601
Number of pages2
JournalMicroscopy and Microanalysis
Volume15
Issue numberSUPPL. 2
DOIs
StatePublished - Jul 1 2009

ASJC Scopus subject areas

  • Instrumentation

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