Range profiles of low-energy (100 to 1500 eV) implanted 3He and 4He atoms in tungsten I. Experimental results

Jun Amano, Alfred Wagner, David N. Seidman

Research output: Contribution to journalArticlepeer-review

15 Scopus citations

Abstract

The range profiles of low-energy (100 to 1500 eV) 3He and 4He atoms implanted in situ, parallel to the [110] direction (±5°) of tungsten, at 60 K have been measured employing an atom-probe field-ion microscope. The absolute depth of each deposited helium atom, from the irradiated surface, was measured directly to within one (110) interplanar spacing (27middot;24 Å). At 60 K both 3He and 4He were found, in other research, to be immobile; thus, the range profiles were determined in the complete absence of any diffusional effects. The mean range (α) of the 3He and 4He range profiles increases monotonically, although non-linearly, as the implantation energy was increased from 100 to 1500 eV; the value of x varies from 33 to 158 Å and from 19 to 195 Å for the 3He and 4He profiles, respectively. The straggling (Δx) of the 3He and 4He range profiles also increases monotonically, although non-linearly, as the implantation energy was increased from 100 to 1500 eV; the value of Δx varies from 23 to 97 Å and from 16 to 124Å for the 3He and 4He profiles, respectively. All of the 3He and 4He range profiles exhibit positive skewness; that is, they are skewed from a normal distribution.

Original languageEnglish (US)
Pages (from-to)177-198
Number of pages22
JournalPhilosophical Magazine A: Physics of Condensed Matter, Structure, Defects and Mechanical Properties
Volume44
Issue number1
DOIs
StatePublished - Jul 1981

Funding

This research was supported by the U.S. Department of Energy. Additional support wa8 received from the National Science Foundation through the use of the technical facilities of the Materials Science Center at Cornell University.

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • General Materials Science
  • Condensed Matter Physics
  • Physics and Astronomy (miscellaneous)
  • Metals and Alloys

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