Rapid manufacturing of embedded microchannels from a single layered SU-8, and determining the dependence of SU-8 young's modulus on exposure dose with a laser acoustic technique

H. Yu, O. Balogun, B. Li, T. W. Murray, X. Zhang

Research output: Contribution to journalConference articlepeer-review

10 Scopus citations

Abstract

This paper presents an innovative methodology for rapid manufacturing embedded microchannels. The presented technology is based on a direct-write technique using a scanning laser system to pattern a single layered SU-8. It greatly simplifies the processes for embedded microchannels fabrication and differs from the previous work that was fundamentally limited by the third dimension (perpendicular to the surface) processing capability. This paper also describes the underlying theory and method to determine the Young's modulus of exposed SU-8 by using a laser acoustic microscopy system. The laser-based ultrasonic technique offers a non-contact, nondestructive means of evaluation and materials characterization. It allows for local inspection of material properties within the field of view of the microscope.

Original languageEnglish (US)
Pages (from-to)654-657
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
StatePublished - Oct 25 2005
Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States
Duration: Jan 30 2005Feb 3 2005

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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