Rapid thermal annealing of YBa2Cu3O7-δ films prepared by OMCVD using a highly volatile fluorocarbon-based precusor

J. Zhao; H. O. Marcy; L. M. Tonge; B. W. Wessels; T. J. Marks; C. R. Kannewurf

doi:10.1016/0921-4534(89)91308-7

Rapid thermal annealing of YBa₂Cu₃O_7-δ films prepared by OMCVD using a highly volatile fluorocarbon-based precusor

J. Zhao, H. O. Marcy, L. M. Tonge, B. W. Wessels, T. J. Marks^*, C. R. Kannewurf

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

Single phase YBa₂Cu₃O_7-δ films having zero resistance at 80-86 K have been reproducibly prepared by organometallic chemical vapor deposition followed by post annealing. The fluoride-substituted β-diketonate Ba(fod)₂ was used as a Ba precurcor for deposition. A systematic study of the microstructure and the electrical properties of the OMCVD-derived films as a function of annealing times is presented. The grain size, texture, and superconducting transition temperature were found to be significantly improved by rapid thermal annealing. Highly oriented films with c axes perpendicular to the substrate surface and with a well-connected dense grain structure were obtained. This work shows that highly volatile fluorocarbon-based precursor can be used in OMCVD of YBa₂Cu₃O_7-δ films having desirable superconducting properties.

Original language	English (US)
Pages (from-to)	710-714
Number of pages	5
Journal	Physica C: Superconductivity and its applications
Volume	159
Issue number	5
DOIs	https://doi.org/10.1016/0921-4534(89)91308-7
State	Published - Jul 15 1989

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Energy Engineering and Power Technology
Electrical and Electronic Engineering

Access to Document

10.1016/0921-4534(89)91308-7

Cite this

@article{ecb81a7a06cd4017bd548ac74fa8a3c8,

title = "Rapid thermal annealing of YBa2Cu3O7-δ films prepared by OMCVD using a highly volatile fluorocarbon-based precusor",

abstract = "Single phase YBa2Cu3O7-δ films having zero resistance at 80-86 K have been reproducibly prepared by organometallic chemical vapor deposition followed by post annealing. The fluoride-substituted β-diketonate Ba(fod)2 was used as a Ba precurcor for deposition. A systematic study of the microstructure and the electrical properties of the OMCVD-derived films as a function of annealing times is presented. The grain size, texture, and superconducting transition temperature were found to be significantly improved by rapid thermal annealing. Highly oriented films with c axes perpendicular to the substrate surface and with a well-connected dense grain structure were obtained. This work shows that highly volatile fluorocarbon-based precursor can be used in OMCVD of YBa2Cu3O7-δ films having desirable superconducting properties.",

author = "J. Zhao and Marcy, {H. O.} and Tonge, {L. M.} and Wessels, {B. W.} and Marks, {T. J.} and Kannewurf, {C. R.}",

year = "1989",

month = jul,

day = "15",

doi = "10.1016/0921-4534(89)91308-7",

language = "English (US)",

volume = "159",

pages = "710--714",

journal = "Physica C: Superconductivity and its Applications",

issn = "0921-4534",

publisher = "Elsevier",

number = "5",

}

TY - JOUR

T1 - Rapid thermal annealing of YBa2Cu3O7-δ films prepared by OMCVD using a highly volatile fluorocarbon-based precusor

AU - Zhao, J.

AU - Marcy, H. O.

AU - Tonge, L. M.

AU - Wessels, B. W.

AU - Marks, T. J.

AU - Kannewurf, C. R.

PY - 1989/7/15

Y1 - 1989/7/15

N2 - Single phase YBa2Cu3O7-δ films having zero resistance at 80-86 K have been reproducibly prepared by organometallic chemical vapor deposition followed by post annealing. The fluoride-substituted β-diketonate Ba(fod)2 was used as a Ba precurcor for deposition. A systematic study of the microstructure and the electrical properties of the OMCVD-derived films as a function of annealing times is presented. The grain size, texture, and superconducting transition temperature were found to be significantly improved by rapid thermal annealing. Highly oriented films with c axes perpendicular to the substrate surface and with a well-connected dense grain structure were obtained. This work shows that highly volatile fluorocarbon-based precursor can be used in OMCVD of YBa2Cu3O7-δ films having desirable superconducting properties.

AB - Single phase YBa2Cu3O7-δ films having zero resistance at 80-86 K have been reproducibly prepared by organometallic chemical vapor deposition followed by post annealing. The fluoride-substituted β-diketonate Ba(fod)2 was used as a Ba precurcor for deposition. A systematic study of the microstructure and the electrical properties of the OMCVD-derived films as a function of annealing times is presented. The grain size, texture, and superconducting transition temperature were found to be significantly improved by rapid thermal annealing. Highly oriented films with c axes perpendicular to the substrate surface and with a well-connected dense grain structure were obtained. This work shows that highly volatile fluorocarbon-based precursor can be used in OMCVD of YBa2Cu3O7-δ films having desirable superconducting properties.

UR - http://www.scopus.com/inward/record.url?scp=0024700516&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0024700516&partnerID=8YFLogxK

U2 - 10.1016/0921-4534(89)91308-7

DO - 10.1016/0921-4534(89)91308-7

M3 - Article

AN - SCOPUS:0024700516

SN - 0921-4534

VL - 159

SP - 710

EP - 714

JO - Physica C: Superconductivity and its Applications

JF - Physica C: Superconductivity and its Applications

IS - 5

ER -

Rapid thermal annealing of YBa₂Cu₃O_7-δ films prepared by OMCVD using a highly volatile fluorocarbon-based precusor

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this