Re-configurable fluid circuits by PDMS elastomer micromachining

Deniz Armani*, Chang Liu, Narayan Aluru

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

384 Scopus citations

Abstract

We report on a microfabrication techniques for realizing re-configurable micro fluidics devices using polymethylsiloxane material (PDMS). The mechanical characteristics of the material, including the Young's modulus and the adhesion energy have been determined experimentally. The magnitude of Young's modulus ranges from 8.7×105 Pa to 3.6×105 Pa. The adhesion energy is a function of the PDMS composition as well as chemical treatment. A method for efficiently developing flow interconnects has been demonstrated.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Editors Anon
PublisherIEEE
Pages222-227
Number of pages6
StatePublished - Jan 1 1999
EventProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS - Orlando, FL, USA
Duration: Jan 17 1999Jan 21 1999

Other

OtherProceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
CityOrlando, FL, USA
Period1/17/991/21/99

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering

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