Readily Accessible Metallic Micro-Island Arrays for High-Performance Metal Oxide Thin-Film Transistors

Jaehyun Kim, Joon Bee Park, Ding Zheng, Joon Seok Kim, Yuhua Cheng, Sung Kyu Park*, Wei Huang*, Tobin J. Marks*, Antonio Facchetti*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

5 Scopus citations


Thin-film transistors using metal oxide semiconductors are essential in many unconventional electronic devices. Nevertheless, further advances will be necessary to broaden their technological appeal. Here, a new strategy is reported to achieve high-performance solution-processed metal oxide thin-film transistors (MOTFTs) by introducing a metallic micro-island array (M-MIA) on top of the MO back channel, where the MO is a-IGZO (amorphous indium-gallium-zinc-oxide). Here Al-MIAs are fabricated using honeycomb cinnamate cellulose films, created by a scalable breath-figure method, as a shadow mask. For IGZO TFTs, the electron mobility (µe) increases from ≈3.6 cm2 V−1 s−1 to near 15.6 cm2 V−1 s−1 for optimal Al-MIA dimension/coverage of 1.25 µm/51%. The Al-MIA IGZO TFT performance is superior to that of controls using compact/planar Al layers (Al-PL TFTs) and Au-MIAs with the same channel coverage. Kelvin probe force microscopy and technology computer-aided design simulations reveal that charge transfer occurs between the Al and the IGZO channel which is optimized for specific Al-MIA dimensions/surface channel coverages. Furthermore, such Al-MIA IGZO TFTs with a high-k fluoride-doped alumina dielectric exhibit a maximum µe of >50.2 cm2 V−1 s−1. This is the first demonstration of a micro-structured MO semiconductor heterojunction with submicrometer resolution metallic arrays for enhanced transistor performance and broad applicability to other devices.

Original languageEnglish (US)
Article number2205871
JournalAdvanced Materials
Issue number45
StatePublished - Nov 10 2022


  • amorphous indium-gallium-zinc-oxide
  • metal oxide semiconductors
  • metallic capping layers
  • technology computer-aided design simulations
  • thin-film transistors

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • General Materials Science


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