Real-time characterization of acoustic modes of polyimide thin-film coatings using impulsive stimulated thermal scattering

Anil R. Duggal*, John A. Rogers, Keith A. Nelson, Mordechai Rothschild

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

A method for real-time optical characterization of thin-film acoustic modes is demonstrated. Pseudo-Rayleigh acoustic waves of thin (∼1 μm) polyimide films attached to silicon substrates are optically excited and monitored in real time as they propagate. The results can be used to determine mechanical properties (elastic moduli) and to guide thin-film fabrication and curing procedures.

Original languageEnglish (US)
Pages (from-to)692-694
Number of pages3
JournalApplied Physics Letters
Volume60
Issue number6
DOIs
StatePublished - Dec 1 1992

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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