Real-time characterization of acoustic modes of polyimide thin-film coatings using impulsive stimulated thermal scattering

Anil R. Duggal; John A. Rogers; Keith A. Nelson; Mordechai Rothschild

doi:10.1063/1.106539

Real-time characterization of acoustic modes of polyimide thin-film coatings using impulsive stimulated thermal scattering

Anil R. Duggal^*, John A. Rogers, Keith A. Nelson, Mordechai Rothschild

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

34 Scopus citations

Abstract

A method for real-time optical characterization of thin-film acoustic modes is demonstrated. Pseudo-Rayleigh acoustic waves of thin (∼1 μm) polyimide films attached to silicon substrates are optically excited and monitored in real time as they propagate. The results can be used to determine mechanical properties (elastic moduli) and to guide thin-film fabrication and curing procedures.

Original language	English (US)
Pages (from-to)	692-694
Number of pages	3
Journal	Applied Physics Letters
Volume	60
Issue number	6
DOIs	https://doi.org/10.1063/1.106539
State	Published - 1992

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.106539

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@article{a11314e6d5a64e97a9a7fadba0023a6a,

title = "Real-time characterization of acoustic modes of polyimide thin-film coatings using impulsive stimulated thermal scattering",

abstract = "A method for real-time optical characterization of thin-film acoustic modes is demonstrated. Pseudo-Rayleigh acoustic waves of thin (∼1 μm) polyimide films attached to silicon substrates are optically excited and monitored in real time as they propagate. The results can be used to determine mechanical properties (elastic moduli) and to guide thin-film fabrication and curing procedures.",

author = "Duggal, {Anil R.} and Rogers, {John A.} and Nelson, {Keith A.} and Mordechai Rothschild",

year = "1992",

doi = "10.1063/1.106539",

language = "English (US)",

volume = "60",

pages = "692--694",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "6",

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TY - JOUR

T1 - Real-time characterization of acoustic modes of polyimide thin-film coatings using impulsive stimulated thermal scattering

AU - Duggal, Anil R.

AU - Rogers, John A.

AU - Nelson, Keith A.

AU - Rothschild, Mordechai

PY - 1992

Y1 - 1992

N2 - A method for real-time optical characterization of thin-film acoustic modes is demonstrated. Pseudo-Rayleigh acoustic waves of thin (∼1 μm) polyimide films attached to silicon substrates are optically excited and monitored in real time as they propagate. The results can be used to determine mechanical properties (elastic moduli) and to guide thin-film fabrication and curing procedures.

AB - A method for real-time optical characterization of thin-film acoustic modes is demonstrated. Pseudo-Rayleigh acoustic waves of thin (∼1 μm) polyimide films attached to silicon substrates are optically excited and monitored in real time as they propagate. The results can be used to determine mechanical properties (elastic moduli) and to guide thin-film fabrication and curing procedures.

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U2 - 10.1063/1.106539

DO - 10.1063/1.106539

M3 - Article

AN - SCOPUS:0005892004

SN - 0003-6951

VL - 60

SP - 692

EP - 694

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 6

ER -

Real-time characterization of acoustic modes of polyimide thin-film coatings using impulsive stimulated thermal scattering

Abstract

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