REAL-TIME DIAGNOSIS OF ETCHING AND DEPOSITION PROCESS BY SPECTROSCOPIC ELLIPSOMETRY.

Keyphrases

• Deposition Process 100%
• Spectroscopic Ellipsometry 100%
• Etching Process 100%
• Reactive Environment 50%
• Recent Advances 50%
• Analytic Tools 50%
• Metal-organic Chemical Vapor Deposition (MOCVD) 50%
• Chemical Etching 50%
• Submonolayer 50%
• Plasma Processing 50%
• High-pressure Environment 50%
• Analytical Procedures 50%

Material Science

• Plasma Etching 100%