Real-time optical characterization of surface acoustic modes of polyimide thin-film coatings

Anil R. Duggal; John A. Rogers; Keith A. Nelson

doi:10.1063/1.351535

Real-time optical characterization of surface acoustic modes of polyimide thin-film coatings

Anil R. Duggal^*, John A. Rogers, Keith A. Nelson

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

102 Scopus citations

Abstract

A modification of the optical technique of impulsive stimulated thermal scattering that allows real-time data acquisition is introduced. The method is used to characterize the pseudo-Rayleigh acoustic modes of thin (∼1 μm) polyimide films attached to silicon substrates and its potential use as a means for extracting the elastic constants of thin-film coatings is demonstrated.

Original language	English (US)
Pages (from-to)	2823-2839
Number of pages	17
Journal	Journal of Applied Physics
Volume	72
Issue number	7
DOIs	https://doi.org/10.1063/1.351535
State	Published - 1992

ASJC Scopus subject areas

General Physics and Astronomy

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10.1063/1.351535

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@article{7aa15442be9843a9bf5f6fb59fa4842b,

title = "Real-time optical characterization of surface acoustic modes of polyimide thin-film coatings",

abstract = "A modification of the optical technique of impulsive stimulated thermal scattering that allows real-time data acquisition is introduced. The method is used to characterize the pseudo-Rayleigh acoustic modes of thin (∼1 μm) polyimide films attached to silicon substrates and its potential use as a means for extracting the elastic constants of thin-film coatings is demonstrated.",

author = "Duggal, \{Anil R.\} and Rogers, \{John A.\} and Nelson, \{Keith A.\}",

year = "1992",

doi = "10.1063/1.351535",

language = "English (US)",

volume = "72",

pages = "2823--2839",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "7",

}

TY - JOUR

T1 - Real-time optical characterization of surface acoustic modes of polyimide thin-film coatings

AU - Duggal, Anil R.

AU - Rogers, John A.

AU - Nelson, Keith A.

PY - 1992

Y1 - 1992

N2 - A modification of the optical technique of impulsive stimulated thermal scattering that allows real-time data acquisition is introduced. The method is used to characterize the pseudo-Rayleigh acoustic modes of thin (∼1 μm) polyimide films attached to silicon substrates and its potential use as a means for extracting the elastic constants of thin-film coatings is demonstrated.

AB - A modification of the optical technique of impulsive stimulated thermal scattering that allows real-time data acquisition is introduced. The method is used to characterize the pseudo-Rayleigh acoustic modes of thin (∼1 μm) polyimide films attached to silicon substrates and its potential use as a means for extracting the elastic constants of thin-film coatings is demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=36449000978&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=36449000978&partnerID=8YFLogxK

U2 - 10.1063/1.351535

DO - 10.1063/1.351535

M3 - Article

AN - SCOPUS:36449000978

SN - 0021-8979

VL - 72

SP - 2823

EP - 2839

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 7

ER -

Real-time optical characterization of surface acoustic modes of polyimide thin-film coatings

Abstract

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