Real-time optical characterization of surface acoustic modes of polyimide thin-film coatings

Anil R. Duggal*, John A. Rogers, Keith A. Nelson

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

94 Scopus citations

Abstract

A modification of the optical technique of impulsive stimulated thermal scattering that allows real-time data acquisition is introduced. The method is used to characterize the pseudo-Rayleigh acoustic modes of thin (∼1 μm) polyimide films attached to silicon substrates and its potential use as a means for extracting the elastic constants of thin-film coatings is demonstrated.

Original languageEnglish (US)
Pages (from-to)2823-2839
Number of pages17
JournalJournal of Applied Physics
Volume72
Issue number7
DOIs
StatePublished - Dec 1 1992

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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