Real-time optical characterization of surface acoustic modes of polyimide thin-film coatings

Anil R. Duggal; John A. Rogers; Keith A. Nelson

doi:10.1063/1.351535

Real-time optical characterization of surface acoustic modes of polyimide thin-film coatings

Anil R. Duggal^*, John A. Rogers, Keith A. Nelson

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

94 Scopus citations

Abstract

A modification of the optical technique of impulsive stimulated thermal scattering that allows real-time data acquisition is introduced. The method is used to characterize the pseudo-Rayleigh acoustic modes of thin (∼1 μm) polyimide films attached to silicon substrates and its potential use as a means for extracting the elastic constants of thin-film coatings is demonstrated.

Original language	English (US)
Pages (from-to)	2823-2839
Number of pages	17
Journal	Journal of Applied Physics
Volume	72
Issue number	7
DOIs	https://doi.org/10.1063/1.351535
State	Published - Dec 1 1992

ASJC Scopus subject areas

Physics and Astronomy(all)

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title = "Real-time optical characterization of surface acoustic modes of polyimide thin-film coatings",

abstract = "A modification of the optical technique of impulsive stimulated thermal scattering that allows real-time data acquisition is introduced. The method is used to characterize the pseudo-Rayleigh acoustic modes of thin (∼1 μm) polyimide films attached to silicon substrates and its potential use as a means for extracting the elastic constants of thin-film coatings is demonstrated.",

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