Abstract
We describe an experimental method capable of evaluating the elastic and loss moduli and the thermal diffusivity in thin films. The versatility of the technique is demonstrated with data scans from several films of technological interest.
| Original language | English (US) |
|---|---|
| Title of host publication | Diagnostic Techniques for Semiconductor Materials Processing |
| Publisher | Publ by Materials Research Society |
| Pages | 317-321 |
| Number of pages | 5 |
| Volume | 324 |
| ISBN (Print) | 1558992235 |
| State | Published - Jan 1 1994 |
| Event | Proceedings of the 1993 Fall Meeting of the Materials Research Society - Boston, MA, USA Duration: Nov 29 1993 → Dec 2 1993 |
Other
| Other | Proceedings of the 1993 Fall Meeting of the Materials Research Society |
|---|---|
| City | Boston, MA, USA |
| Period | 11/29/93 → 12/2/93 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Engineering(all)
- Earth and Planetary Sciences(all)
- Environmental Science(all)