@inproceedings{0289b920ae814b7f9282846019a43487,
title = "Real-time thermo-mechanical property evaluation of thin films",
abstract = "We describe an experimental method capable of evaluating the elastic and loss moduli and the thermal diffusivity in thin films. The versatility of the technique is demonstrated with data scans from several films of technological interest.",
author = "Rogers, {John A.} and Nelson, {K. A.}",
year = "1994",
language = "English (US)",
isbn = "1558992235",
series = "Materials Research Society Symposium Proceedings",
publisher = "Publ by Materials Research Society",
pages = "317--321",
booktitle = "Diagnostic Techniques for Semiconductor Materials Processing",
note = "Proceedings of the 1993 Fall Meeting of the Materials Research Society ; Conference date: 29-11-1993 Through 02-12-1993",
}