Realization of Wafer-Scale 1T-MoS2 Film for Efficient Hydrogen Evolution Reaction

Hyeong U. Kim, Mansu Kim, Hyunho Seok, Kyu Young Park, Ji Yun Moon, Jonghwan Park, Byeong Seon An, Hee Joon Jung, Vinayak P. Dravid, Dongmok Whang*, Jae Hyun Lee*, Taesung Kim*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

13 Scopus citations


The octahedral structure of 2D molybdenum disulfide (1T-MoS2) has attracted attention as a high-efficiency and low-cost electrocatalyst for hydrogen production. However, the large-scale synthesis of 1T-MoS2 films has not been realized because of higher formation energy compared to that of the trigonal prismatic phase (2H)-MoS2. In this study, a uniform wafer-scale synthesis of the metastable 1T-MoS2 film is performed by sulfidation of the Mo metal layer using a plasma-enhanced chemical vapor deposition (PE-CVD) system. Thus, plasma-containing highly reactive ions and radicals of the sulfurization precursor enable the synthesis of 1T-MoS2 at 150 °C. Electrochemical analysis of 1T-MoS2 shows enhanced catalytic activity for the hydrogen evolution reaction (HER) compared to that of previously reported MoS2 electrocatalysts 1T-MoS2 does not transform into stable 2H-MoS2 even after 1000 cycles of HER. The proposed low-temperature synthesis approach may offer a promising solution for the facile production of various metastable-phase 2D materials.

Original languageEnglish (US)
Pages (from-to)1344-1350
Number of pages7
Issue number5
StatePublished - Mar 5 2021


  • chalcogenides
  • chemical vapor deposition
  • electrocatalysis
  • hydrogen evolution reaction
  • plasma

ASJC Scopus subject areas

  • Energy(all)
  • Chemical Engineering(all)
  • Materials Science(all)
  • Environmental Chemistry


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