Abstract
Using conventional magnetron sputtering of graphite in an argon/nitrogen plasma, one can synthesize amorphous carbon nitride coatings. By controlling the total pressure, the nitrogen partial pressure and the substrate bias during film growth, one can obtain amorphous carbon nitride with hardness ~25-30 GPa and surface roughness below 0.2 nm. When used as a wear protective coating on hard disks and steel surfaces, one achieves a wear life improvement of a factor of three to ten over conventional coatings such as titanium nitride and amorphous carbon, respectively.
Original language | English (US) |
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Pages (from-to) | 589-596 |
Number of pages | 8 |
Journal | Japanese Journal of Tribology |
Volume | 43 |
Issue number | 5 |
State | Published - Dec 1 1998 |
Keywords
- Carbon nitride
- Hard coatings
- Hard disk overcoat
- Magnetron sputtering
- Nanoindentation
- Thin films
- Tribology
- Wear
ASJC Scopus subject areas
- Mechanics of Materials
- Mechanical Engineering
- Surfaces, Coatings and Films
- Materials Chemistry