Recent progress in the synthesis and characterization of amorphous and crystalline carbon nitride coatings

Ian Widlow*, Yip Wah Chung

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

This review summarizes our most recent findings in the structure and properties of amorphous and crystalline carbon nitride coatings, synthesized by reactive magnetron sputtering. By careful control of the plasma conditions via proper choice of process parameters such as substrate bias, target power and gas pressure, one can precisely control film structure and properties. With this approach, we were able to produce amorphous carbon nitride films with controlled hardness and surface roughness. In particular, we can synthesize ultrathin (1 nm thick) amorphous carbon nitride films to be sufficiently dense and uniform that they provide adequate corrosion protection for hard disk applications. We demonstrated the strong correlation between ZrN(111) texture and hardness in CNcursive Greek chi/ZrN superlattice coatings. Raman spectroscopy and near-edge x-ray absorption show the predominance of sp3-bonded carbon in these superlattice coatings.

Original languageEnglish (US)
Pages (from-to)490-498
Number of pages9
JournalBrazilian Journal of Physics
Volume30
Issue number3
DOIs
StatePublished - Sep 2000

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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