Reduction of electron channeling in EDS using precession

Yifeng Liao*, Laurence D. Marks

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


We demonstrated that EDS measurement can be significantly improved by precessing the electron beam, thereby reducing electron channeling effects. For a SrTiO3 specimen orientated along the [001] zone axis, the measured strontium to titanium atomic ratio was 0.74-0.80 using conventional EDS methods, and the ratio was improved to ~0.99 by precessing the electron beam for angles greater than 22.54mRad. In ALCHEMI-like experiments in which the specimen was tilted to near two-beam condition, the strontium to titanium ratio was insensitive to the deviation from the Bragg condition using a precessed electron beam. Similar reduction of electron channeling effects was also observed in precession-assisted EDS measurements for an L21-ordered Fe2MnAl intermetallic alloy tilted to the [011] zone axis as well as near two-beam conditions.

Original languageEnglish (US)
Pages (from-to)19-22
Number of pages4
StatePublished - Mar 2013


  • EDS
  • Electron channeling
  • Precession electron diffraction

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

Fingerprint Dive into the research topics of 'Reduction of electron channeling in EDS using precession'. Together they form a unique fingerprint.

Cite this