Reduction of electron channeling in EDS using precession

Yifeng Liao; Laurence D. Marks

doi:10.1016/j.ultramic.2012.11.007

Reduction of electron channeling in EDS using precession

Yifeng Liao^*, Laurence D. Marks

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

We demonstrated that EDS measurement can be significantly improved by precessing the electron beam, thereby reducing electron channeling effects. For a SrTiO₃ specimen orientated along the [001] zone axis, the measured strontium to titanium atomic ratio was 0.74-0.80 using conventional EDS methods, and the ratio was improved to ~0.99 by precessing the electron beam for angles greater than 22.54mRad. In ALCHEMI-like experiments in which the specimen was tilted to near two-beam condition, the strontium to titanium ratio was insensitive to the deviation from the Bragg condition using a precessed electron beam. Similar reduction of electron channeling effects was also observed in precession-assisted EDS measurements for an L2₁-ordered Fe₂MnAl intermetallic alloy tilted to the [011] zone axis as well as near two-beam conditions.

Original language	English (US)
Pages (from-to)	19-22
Number of pages	4
Journal	Ultramicroscopy
Volume	126
DOIs	https://doi.org/10.1016/j.ultramic.2012.11.007
State	Published - Mar 2013

Keywords

EDS
Electron channeling
Precession electron diffraction

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Atomic and Molecular Physics, and Optics

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10.1016/j.ultramic.2012.11.007

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@article{49b80e78112c4554b24c90b7701c8557,

title = "Reduction of electron channeling in EDS using precession",

abstract = "We demonstrated that EDS measurement can be significantly improved by precessing the electron beam, thereby reducing electron channeling effects. For a SrTiO3 specimen orientated along the [001] zone axis, the measured strontium to titanium atomic ratio was 0.74-0.80 using conventional EDS methods, and the ratio was improved to ~0.99 by precessing the electron beam for angles greater than 22.54mRad. In ALCHEMI-like experiments in which the specimen was tilted to near two-beam condition, the strontium to titanium ratio was insensitive to the deviation from the Bragg condition using a precessed electron beam. Similar reduction of electron channeling effects was also observed in precession-assisted EDS measurements for an L21-ordered Fe2MnAl intermetallic alloy tilted to the [011] zone axis as well as near two-beam conditions.",

keywords = "EDS, Electron channeling, Precession electron diffraction",

author = "Yifeng Liao and Marks, {Laurence D.}",

note = "Funding Information: This research is supported by the NSF on Grant number CMMI-1030703 and by the NIH on Grant number 1RC2AR058993-01 . The authors are indebted to Professor Ian Baker at Dartmouth College, Mr. Yuyuan Lin, and Dr. Houari Amari for helpful discussions and for providing the specimens.",

year = "2013",

month = mar,

doi = "10.1016/j.ultramic.2012.11.007",

language = "English (US)",

volume = "126",

pages = "19--22",

journal = "Ultramicroscopy",

issn = "0304-3991",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Reduction of electron channeling in EDS using precession

AU - Liao, Yifeng

AU - Marks, Laurence D.

N1 - Funding Information: This research is supported by the NSF on Grant number CMMI-1030703 and by the NIH on Grant number 1RC2AR058993-01 . The authors are indebted to Professor Ian Baker at Dartmouth College, Mr. Yuyuan Lin, and Dr. Houari Amari for helpful discussions and for providing the specimens.

PY - 2013/3

Y1 - 2013/3

N2 - We demonstrated that EDS measurement can be significantly improved by precessing the electron beam, thereby reducing electron channeling effects. For a SrTiO3 specimen orientated along the [001] zone axis, the measured strontium to titanium atomic ratio was 0.74-0.80 using conventional EDS methods, and the ratio was improved to ~0.99 by precessing the electron beam for angles greater than 22.54mRad. In ALCHEMI-like experiments in which the specimen was tilted to near two-beam condition, the strontium to titanium ratio was insensitive to the deviation from the Bragg condition using a precessed electron beam. Similar reduction of electron channeling effects was also observed in precession-assisted EDS measurements for an L21-ordered Fe2MnAl intermetallic alloy tilted to the [011] zone axis as well as near two-beam conditions.

AB - We demonstrated that EDS measurement can be significantly improved by precessing the electron beam, thereby reducing electron channeling effects. For a SrTiO3 specimen orientated along the [001] zone axis, the measured strontium to titanium atomic ratio was 0.74-0.80 using conventional EDS methods, and the ratio was improved to ~0.99 by precessing the electron beam for angles greater than 22.54mRad. In ALCHEMI-like experiments in which the specimen was tilted to near two-beam condition, the strontium to titanium ratio was insensitive to the deviation from the Bragg condition using a precessed electron beam. Similar reduction of electron channeling effects was also observed in precession-assisted EDS measurements for an L21-ordered Fe2MnAl intermetallic alloy tilted to the [011] zone axis as well as near two-beam conditions.

KW - EDS

KW - Electron channeling

KW - Precession electron diffraction

UR - http://www.scopus.com/inward/record.url?scp=84873134515&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84873134515&partnerID=8YFLogxK

U2 - 10.1016/j.ultramic.2012.11.007

DO - 10.1016/j.ultramic.2012.11.007

M3 - Article

C2 - 23376402

AN - SCOPUS:84873134515

SN - 0304-3991

VL - 126

SP - 19

EP - 22

JO - Ultramicroscopy

JF - Ultramicroscopy

ER -

Reduction of electron channeling in EDS using precession

Abstract

Keywords

ASJC Scopus subject areas

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