Reduction photolithography using microlens arrays: Applications in gray scale photolithography

Engineering

• Optical Lithography 100%
• Grayscale 50%
• Applications 50%
• Reduction 33%
• Micro-Lens Array 33%
• Microstructure 16%
• Photoresist 16%
• Size Reduction 16%
• Centimeter 16%
• Elements 16%
• Generates 16%
• Lenses 16%
• Projectors 16%

INIS

• applications 50%
• reduction 33%
• films 16%
• lenses 16%
• size 16%
• masks 16%
• configuration 16%
• microstructure 16%
• optics 16%
• comminution 16%
• transparency 16%
• illumination 16%

Material Science

• Liquid Films 16%
• Microstructure 16%