The relative dielectric constant of an epitaxial BaTiO 3 thin film up to 40 GHz was determined from the measured phase shift and fitting to simulated data. The frequency dependence was found to obey a Curie-von Schweidler law over a frequency range of 0.25 to 40 GHz. Coplanar stripline (CPS) waveguides were formed on the BaTiO 3 films and the dielectric constant was determined by matching the reflection parameter by measurement with that by simulations. The results show that the measured microwave effective refractive index is 3.6 to 40 GHz for a CPS waveguide on the BaTiO 3/MgO structure.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)