Reproducible lateral force microscopy measurements for quantitative comparisons of the frictional and chemical properties of nanostructures

M. W. Such; D. E. Kramer; M. C. Hersam

doi:10.1016/j.ultramic.2003.12.005

Reproducible lateral force microscopy measurements for quantitative comparisons of the frictional and chemical properties of nanostructures

M. W. Such, D. E. Kramer, M. C. Hersam^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

Atomic force microscopy (AFM) is a widely used technique for characterizing the topography and frictional properties of nanostructures. Inherent misalignments between the AFM cantilever and the feedback hardware lead to crosstalk between topography data and lateral force microscopy (LFM) data. Because the degree of crosstalk depends on the positioning of the cantilever, LFM and topography data of the same structure can vary from one experiment to the next. For nanostructures with large LFM contrast, errors as large as 50% in topography and LFM can be observed. This paper describes an empirical strategy for correcting this alignment error. The technique is used to characterize the frictional properties of scanning probe-induced oxide nanostructures and the hydrogen-terminated Si(111) surfaces on which they are patterned. Reproducible differences in the frictional properties of the oxide nanostructures patterned on HF-treated and NH₄F-treated Si(111) surfaces are observed and attributed to the mixed-hydride versus monohydride termination of each surface. The observed frictional contrast is consistent with known differences in surface reactivity and demonstrates how LFM measurements can provide insight into the frictional and chemical properties of nanostructures

Original language	English (US)
Pages (from-to)	189-196
Number of pages	8
Journal	Ultramicroscopy
Volume	99
Issue number	2-3
DOIs	https://doi.org/10.1016/j.ultramic.2003.12.005
State	Published - May 2004

Funding

The authors wish to thank C.R. Kinser for help with XPS characterization and other experimental advice. The authors also acknowledge useful discussions with P.A. Bertin, S.T. Nguyen, and T.L. Sheppard. This work was supported by an Arnold and Mabel Beckman Young Investigator Award, the Northwestern University Institute for Bioengineering and Nanoscience in Advanced Medicine, the Rockefeller Brothers Fund, and the Nanoscale Science and Engineering Initiative of the National Science Foundation under NSF Award Numbers EEC–0118025 and DMR-0134706.

Keywords

07.79.S
18
68.65
81.65.C
Lateral force microscopy
Nanolithography
Oxidation
Silicon

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Atomic and Molecular Physics, and Optics

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10.1016/j.ultramic.2003.12.005

Cite this

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title = "Reproducible lateral force microscopy measurements for quantitative comparisons of the frictional and chemical properties of nanostructures",

abstract = "Atomic force microscopy (AFM) is a widely used technique for characterizing the topography and frictional properties of nanostructures. Inherent misalignments between the AFM cantilever and the feedback hardware lead to crosstalk between topography data and lateral force microscopy (LFM) data. Because the degree of crosstalk depends on the positioning of the cantilever, LFM and topography data of the same structure can vary from one experiment to the next. For nanostructures with large LFM contrast, errors as large as 50% in topography and LFM can be observed. This paper describes an empirical strategy for correcting this alignment error. The technique is used to characterize the frictional properties of scanning probe-induced oxide nanostructures and the hydrogen-terminated Si(111) surfaces on which they are patterned. Reproducible differences in the frictional properties of the oxide nanostructures patterned on HF-treated and NH4F-treated Si(111) surfaces are observed and attributed to the mixed-hydride versus monohydride termination of each surface. The observed frictional contrast is consistent with known differences in surface reactivity and demonstrates how LFM measurements can provide insight into the frictional and chemical properties of nanostructures",

keywords = "07.79.S, 18, 68.65, 81.65.C, Lateral force microscopy, Nanolithography, Oxidation, Silicon",

author = "Such, {M. W.} and Kramer, {D. E.} and Hersam, {M. C.}",

note = "Funding Information: The authors wish to thank C.R. Kinser for help with XPS characterization and other experimental advice. The authors also acknowledge useful discussions with P.A. Bertin, S.T. Nguyen, and T.L. Sheppard. This work was supported by an Arnold and Mabel Beckman Young Investigator Award, the Northwestern University Institute for Bioengineering and Nanoscience in Advanced Medicine, the Rockefeller Brothers Fund, and the Nanoscale Science and Engineering Initiative of the National Science Foundation under NSF Award Numbers EEC–0118025 and DMR-0134706.",

year = "2004",

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doi = "10.1016/j.ultramic.2003.12.005",

language = "English (US)",

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AU - Such, M. W.

AU - Kramer, D. E.

AU - Hersam, M. C.

N1 - Funding Information: The authors wish to thank C.R. Kinser for help with XPS characterization and other experimental advice. The authors also acknowledge useful discussions with P.A. Bertin, S.T. Nguyen, and T.L. Sheppard. This work was supported by an Arnold and Mabel Beckman Young Investigator Award, the Northwestern University Institute for Bioengineering and Nanoscience in Advanced Medicine, the Rockefeller Brothers Fund, and the Nanoscale Science and Engineering Initiative of the National Science Foundation under NSF Award Numbers EEC–0118025 and DMR-0134706.

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N2 - Atomic force microscopy (AFM) is a widely used technique for characterizing the topography and frictional properties of nanostructures. Inherent misalignments between the AFM cantilever and the feedback hardware lead to crosstalk between topography data and lateral force microscopy (LFM) data. Because the degree of crosstalk depends on the positioning of the cantilever, LFM and topography data of the same structure can vary from one experiment to the next. For nanostructures with large LFM contrast, errors as large as 50% in topography and LFM can be observed. This paper describes an empirical strategy for correcting this alignment error. The technique is used to characterize the frictional properties of scanning probe-induced oxide nanostructures and the hydrogen-terminated Si(111) surfaces on which they are patterned. Reproducible differences in the frictional properties of the oxide nanostructures patterned on HF-treated and NH4F-treated Si(111) surfaces are observed and attributed to the mixed-hydride versus monohydride termination of each surface. The observed frictional contrast is consistent with known differences in surface reactivity and demonstrates how LFM measurements can provide insight into the frictional and chemical properties of nanostructures

AB - Atomic force microscopy (AFM) is a widely used technique for characterizing the topography and frictional properties of nanostructures. Inherent misalignments between the AFM cantilever and the feedback hardware lead to crosstalk between topography data and lateral force microscopy (LFM) data. Because the degree of crosstalk depends on the positioning of the cantilever, LFM and topography data of the same structure can vary from one experiment to the next. For nanostructures with large LFM contrast, errors as large as 50% in topography and LFM can be observed. This paper describes an empirical strategy for correcting this alignment error. The technique is used to characterize the frictional properties of scanning probe-induced oxide nanostructures and the hydrogen-terminated Si(111) surfaces on which they are patterned. Reproducible differences in the frictional properties of the oxide nanostructures patterned on HF-treated and NH4F-treated Si(111) surfaces are observed and attributed to the mixed-hydride versus monohydride termination of each surface. The observed frictional contrast is consistent with known differences in surface reactivity and demonstrates how LFM measurements can provide insight into the frictional and chemical properties of nanostructures

KW - 07.79.S

KW - 18

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KW - Lateral force microscopy

KW - Nanolithography

KW - Oxidation

KW - Silicon

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Reproducible lateral force microscopy measurements for quantitative comparisons of the frictional and chemical properties of nanostructures

Abstract

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Keywords

ASJC Scopus subject areas

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