Resolution improvement through sparse image reconstruction techniques for dark field subsurface microscopy of integrated circuits

T. Berkin Cilingiroglu, W. Clem Karl, Janusz Konrad, Michael D W Grogan, Abdulkadir Yurt, Ahmet Tuysuzoglu, Bennett B. Goldberg, M. Selim Unlu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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