Resolution in soft X-ray microscopes

C. Jacobsen*, J. Kirz, S. Williams

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

60 Scopus citations

Abstract

X-Ray microscopes are able to image thick, wet biological specimens at 50 mm or better resolution, to perform elemental analysis at 0.1-10 μm resolution with as high as ppm sensitivity, and to analyze surface composition at 0.1-1 μm resolution. We concentrate here on the use of soft X-rays, where the wavelength is typically >1 nm, although mention of some techniques and results at shorter wavelength is also made. We discuss the physical priciples behind X-ray microscopes, the types of optical systems used and their achievable resolution. resolution limitations imposed by radiation damage, and recent application of X-ray microscopes to the imaging of biological, materials science, geological, and other specimens.

Original languageEnglish (US)
Pages (from-to)55-79
Number of pages25
JournalUltramicroscopy
Volume47
Issue number1-3
DOIs
StatePublished - Nov 2 1992

Funding

We gratefully acknowledge many helpful dts-cusslons with Harald Ade, Christopher Buckley, Malcolm Howells, Graeme Morrlson, Mark Rtv-ers, David Sayre, and Gunther Schmahl We thank David Attwood of the Center for X-ray Optics at LBL for his support, especially in connection with zone plate fabrication We are grateful for the generous assistance of the staff of the National Synchrotron Light Source (supported by the Department of Energy under contract DE-AC02-76CH000016) Finally, we thank the National Science Foundation for support under grant DIR-9005893, and the Office of Health and Energy Research of the Department of Energy for support under contract DE-FG02-89ER60858

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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