Scanning probe lithography tips with spring-on-tip designs: Analysis, fabrication, and testing

Xuefeng Wang, Loren Vincent, David Bullen, Jun Zou, Chang Liu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

This letter reports a special tip design for probes used in scanning probe lithography applications. The sidewalls of the pyramidal tip located at the distal end of a cantilever probe are modified to contain folded spring structures to reduce the overall force constant of the scanning probe. The spring structure is generated using focused ion beam milling method. We have conducted finite element simulation of the force constants of such folded springs under various geometries. We also demonstrated sub-100 nm scanning probe lithography using a modified spring tip in the dip pen nanolithography writing mode.

Original languageEnglish (US)
Article number054102
JournalApplied Physics Letters
Volume87
Issue number5
DOIs
StatePublished - 2005

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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