Scanning probe lithography tips with spring-on-tip designs: Analysis, fabrication, and testing

Xuefeng Wang; Loren Vincent; David Bullen; Jun Zou; Chang Liu

doi:10.1063/1.2006210

Scanning probe lithography tips with spring-on-tip designs: Analysis, fabrication, and testing

Xuefeng Wang, Loren Vincent, David Bullen, Jun Zou, Chang Liu^*

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

This letter reports a special tip design for probes used in scanning probe lithography applications. The sidewalls of the pyramidal tip located at the distal end of a cantilever probe are modified to contain folded spring structures to reduce the overall force constant of the scanning probe. The spring structure is generated using focused ion beam milling method. We have conducted finite element simulation of the force constants of such folded springs under various geometries. We also demonstrated sub-100 nm scanning probe lithography using a modified spring tip in the dip pen nanolithography writing mode.

Original language	English (US)
Article number	054102
Journal	Applied Physics Letters
Volume	87
Issue number	5
DOIs	https://doi.org/10.1063/1.2006210
State	Published - 2005

Funding

This work was supported by DARPA Advanced Lithography Program and NSF EEC-0118025. The FIB milling experiments were conducted in the Center for Microanalysis of Materials, University of Illinois, which is partially supported by the DOE DEFG02-91-ER45439.

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2006210

Cite this

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title = "Scanning probe lithography tips with spring-on-tip designs: Analysis, fabrication, and testing",

abstract = "This letter reports a special tip design for probes used in scanning probe lithography applications. The sidewalls of the pyramidal tip located at the distal end of a cantilever probe are modified to contain folded spring structures to reduce the overall force constant of the scanning probe. The spring structure is generated using focused ion beam milling method. We have conducted finite element simulation of the force constants of such folded springs under various geometries. We also demonstrated sub-100 nm scanning probe lithography using a modified spring tip in the dip pen nanolithography writing mode.",

author = "Xuefeng Wang and Loren Vincent and David Bullen and Jun Zou and Chang Liu",

note = "Funding Information: This work was supported by DARPA Advanced Lithography Program and NSF EEC-0118025. The FIB milling experiments were conducted in the Center for Microanalysis of Materials, University of Illinois, which is partially supported by the DOE DEFG02-91-ER45439.",

year = "2005",

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AU - Vincent, Loren

AU - Bullen, David

AU - Zou, Jun

AU - Liu, Chang

N1 - Funding Information: This work was supported by DARPA Advanced Lithography Program and NSF EEC-0118025. The FIB milling experiments were conducted in the Center for Microanalysis of Materials, University of Illinois, which is partially supported by the DOE DEFG02-91-ER45439.

PY - 2005

Y1 - 2005

N2 - This letter reports a special tip design for probes used in scanning probe lithography applications. The sidewalls of the pyramidal tip located at the distal end of a cantilever probe are modified to contain folded spring structures to reduce the overall force constant of the scanning probe. The spring structure is generated using focused ion beam milling method. We have conducted finite element simulation of the force constants of such folded springs under various geometries. We also demonstrated sub-100 nm scanning probe lithography using a modified spring tip in the dip pen nanolithography writing mode.

AB - This letter reports a special tip design for probes used in scanning probe lithography applications. The sidewalls of the pyramidal tip located at the distal end of a cantilever probe are modified to contain folded spring structures to reduce the overall force constant of the scanning probe. The spring structure is generated using focused ion beam milling method. We have conducted finite element simulation of the force constants of such folded springs under various geometries. We also demonstrated sub-100 nm scanning probe lithography using a modified spring tip in the dip pen nanolithography writing mode.

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Scanning probe lithography tips with spring-on-tip designs: Analysis, fabrication, and testing

Abstract

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ASJC Scopus subject areas

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