Keyphrases
AlN Film
100%
AlN Thin Film
100%
Crystal Symmetry
100%
Microcrystallinity
100%
Nonlinearity
100%
Radio Frequency
100%
RF Sputtering
100%
Sapphire Substrate
100%
Second Harmonic Generation
100%
Second-order Nonlinearity
100%
Second-order Optical Nonlinearity
100%
Silica
100%
Sputter-deposited
100%
Sputtering Method
100%
Tensorial Properties
100%
Engineering
Deposited Film
33%
Harmonic Generation
33%
Nonlinearity
100%
Radio Frequency
100%
Sapphire Substrate
33%
Silicon Dioxide
33%
Thin Films
100%
Material Science
Aluminum Nitride
100%
Crystal Symmetry
33%
Film
100%
Microcrystallinity
33%
Sapphire
33%
Thin Films
100%
Physics
Second Harmonic Generation
100%
Thin Films
100%