Separable water supply machine for hydraulic-driven micro device

Yudai Fujiwara, Tohru Sasaki, Masao Hebisawa, Shohei Hanaoka, Kenji Terabayashi, Mitsuru Jindai, Kuniaki Dohda, Satoshi Kuroda

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A hydraulically driven microdevice that we developed has both high-precision sensing and high-resolution positioning. A water-supply machine supplies and extracts water to and from the hydraulically driven microdevice, an end effector, for micromanipulation. Controlled by the water-supply machine, the hydraulically driven microdevice handles objects and measures the amount of force acting on the end effector by measuring changes in pressure. Our previous device can measure small forces acting on the end effector. However, it is difficult to position the device when the gain in the measured force is high because the end effector moves a large amount in response to a small amount of liquid supplied, and the positioning resolution decreases. This makes the device unsuitable for micro-manipulation. High-precision sensing and high-resolution positioning have a trade-off relationship. To solve this problem, we propose a new machine called a separated water-supply machine. The part that supplies water and the part that measures pressure are separated through a flow channel. Each part is its own cylinder. The cross section of the part that supplies water is large; the cross section of the part that measures pressure is small. This enables the machine to supply water to the hydraulically driven microdevice with precision while also being highly sensitive to gain in measured force. This report describes the separated water-supply machine that we developed and the results of our evaluation of its sensing precision and positioning resolution.

Original languageEnglish (US)
Title of host publicationEuropean Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018
EditorsO. Riemer, Enrico Savio, D. Billington, R. K. Leach, D. Phillips
Publishereuspen
Pages225-226
Number of pages2
ISBN (Print)9780995775121
StatePublished - Jan 1 2018
Event18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018 - Venice, Italy
Duration: Jun 4 2018Jun 8 2018

Publication series

NameEuropean Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018

Other

Other18th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2018
CountryItaly
CityVenice
Period6/4/186/8/18

Keywords

  • Accuracy
  • Actuator
  • Hydrostatic
  • Sensor

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Instrumentation
  • Environmental Engineering
  • Mechanical Engineering
  • Materials Science(all)

Fingerprint Dive into the research topics of 'Separable water supply machine for hydraulic-driven micro device'. Together they form a unique fingerprint.

Cite this