Silicon nanomembranes for fingertip electronics

Ming Ying*, Andrew P. Bonifas, Nanshu Lu, Yewang Su, Rui Li, Huanyu Cheng, Abid Ameen, Yonggang Huang, John A. Rogers

*Corresponding author for this work

Research output: Contribution to journalArticle

131 Citations (Scopus)

Abstract

We describe the use of semiconductor nanomaterials, advanced fabrication methods and unusual device designs for a class of electronics capable of integration onto the inner and outer surfaces of thin, elastomeric sheets in closed-tube geometries, specially formed for mounting on the fingertips. Multifunctional systems of this type allow electrotactile stimulation with electrode arrays multiplexed using silicon nanomembrane (Si NM) diodes, high-sensitivity strain monitoring with Si NM gauges, and tactile sensing with elastomeric capacitors. Analytical calculations and finite element modeling of the mechanics quantitatively capture the key behaviors during fabrication/assembly, mounting and use. The results provide design guidelines that highlight the importance of the NM geometry in achieving the required mechanical properties. This type of technology could be used in applications ranging from human-machine interfaces to instrumented surgical gloves and many others.

Original languageEnglish (US)
Article number344004
JournalNanotechnology
Volume23
Issue number34
DOIs
StatePublished - Aug 31 2012

Fingerprint

Silicon
Mountings
Electronic equipment
Fabrication
Geometry
Nanostructured materials
Gages
Mechanics
Diodes
Capacitors
Semiconductor materials
Mechanical properties
Electrodes
Monitoring
elastomeric

ASJC Scopus subject areas

  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Ying, M., Bonifas, A. P., Lu, N., Su, Y., Li, R., Cheng, H., ... Rogers, J. A. (2012). Silicon nanomembranes for fingertip electronics. Nanotechnology, 23(34), [344004]. https://doi.org/10.1088/0957-4484/23/34/344004
Ying, Ming ; Bonifas, Andrew P. ; Lu, Nanshu ; Su, Yewang ; Li, Rui ; Cheng, Huanyu ; Ameen, Abid ; Huang, Yonggang ; Rogers, John A. / Silicon nanomembranes for fingertip electronics. In: Nanotechnology. 2012 ; Vol. 23, No. 34.
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Ying, M, Bonifas, AP, Lu, N, Su, Y, Li, R, Cheng, H, Ameen, A, Huang, Y & Rogers, JA 2012, 'Silicon nanomembranes for fingertip electronics', Nanotechnology, vol. 23, no. 34, 344004. https://doi.org/10.1088/0957-4484/23/34/344004

Silicon nanomembranes for fingertip electronics. / Ying, Ming; Bonifas, Andrew P.; Lu, Nanshu; Su, Yewang; Li, Rui; Cheng, Huanyu; Ameen, Abid; Huang, Yonggang; Rogers, John A.

In: Nanotechnology, Vol. 23, No. 34, 344004, 31.08.2012.

Research output: Contribution to journalArticle

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Ying M, Bonifas AP, Lu N, Su Y, Li R, Cheng H et al. Silicon nanomembranes for fingertip electronics. Nanotechnology. 2012 Aug 31;23(34). 344004. https://doi.org/10.1088/0957-4484/23/34/344004