Chad Mirkin (Inventor)
Research output: Patent
}
TY - PAT
T1 - SILICON PEN NANOLITHOGRAPHY
AU - Mirkin, Chad
N1 - filingdate: 2011-11-30 issueddate: 2015-2-24 Status: published attorneydocketnumber: 2009-092-04
PY - 2012/6/28
Y1 - 2012/6/28
M3 - Patent
M1 - 8961853
ER -