Single molecule electronics

Mark Hersam*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


The fabrication and characterization of single molecule units on silicion(100) surface was analyzed using ultra-high vacuum scanning tunneling microscope (UHV-STM). The impact of feedback controlled lithography (FCL) hydrogen desorption on VLSI technology was also studied. The analysis of mechanical, chemical and electronic properties of desorbed species suggested that efficient STM potentiometric location of p-n junctions made them useful as alignment markers.

Original languageEnglish (US)
Number of pages1
JournalProceedings of the IEEE Great Lakes Symposium on VLSI
StatePublished - Jan 1 2001

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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