Single molecule electronics

M. C. Hersam*

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review


The fabrication and characterization of single molecule units on silicion(100) surface was analyzed using ultra-high vacuum scanning tunneling microscope (UHV-STM). The impact of feedback controlled lithography (FCL) hydrogen desorption on VLSI technology was also studied. The analysis of mechanical, chemical and electronic properties of desorbed species suggested that efficient STM potentiometric location of p-n junctions made them useful as alignment markers.

Original languageEnglish (US)
Pages (from-to)128
Number of pages1
JournalProceedings of the IEEE Great Lakes Symposium on VLSI
StatePublished - 2001
Externally publishedYes
Event11th Great Lakes Sysmposium on VLSI (GLSVLSI 2001) - West Lafayette, IN, United States
Duration: Mar 22 2001Mar 23 2001

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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