Six-axis nanopositioning device with precision magnetic levitation technoloy

Shobhit Verma; Wong jong Kim; Jie Gu

doi:10.1109/TMECH.2004.828648

Six-axis nanopositioning device with precision magnetic levitation technoloy

Shobhit Verma^*, Wong jong Kim, Jie Gu

^*Corresponding author for this work

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

111 Scopus citations

Abstract

In this paper, we present the design, control, and testing of a 6 degrees-of-freedom magnetically-levitated system with nanometer-precision positioning capability and several-hundred-micrometer travel range. This system levitates a triangular single-moving-part platen, and produces the six-axis motion with six single-axis linear actuators. One of the prominent advantages of this magnetic levitation (maglev) system is that there is no physical contact between the moving part and the stator, which eliminates friction, wear, backlash, and hysteresis. As compared to other traditional devices, the present system is very compact with the minimum number of actuators for six-axis motion generation. The maglev device presented herein shows the position resolution better than 5 nm with 2-nm rms position noise, and is capable of a velocity of 0.5 m/s and an acceleration of 30 m/s². The nominal power consumption is only 15 mW by each horizontal actuator, and 320 mW by each vertical actuator. The actuators are sized to be able to orient and position a maximum payload of 1 kg. The key application of this maglev device is the manipulation at nanoscale for microassemblies and manufacture of their parts. Other potential applications are stereolithography, vibration-free delicate instrumentation, and microscale rapid prototyping.

Original language	English (US)
Pages (from-to)	384-391
Number of pages	8
Journal	IEEE/ASME Transactions on Mechatronics
Volume	9
Issue number	2
DOIs	https://doi.org/10.1109/TMECH.2004.828648
State	Published - Jun 2004

Funding

Manuscript received April 25, 2003; revised July 29, 2003. This work was supported by the National Science Foundation under Grant CMS-0116642. S. Verma is with the Department of Mechanical Engineering, Texas A&M University, College Station, TX 77840 USA (e-mail: [email protected]). W. Kim is with the Department of Mechanical Engineering, Texas A&M University, College Station, TX 77843-3123 USA (e-mail: [email protected]). J. Gu was with the Mechanical Engineering Department, Texas A&M University, College Station, TX 77840 USA. He is now with the Department of Electrical Engineering, University of Minnesota, Minneapolis, MN 55455 USA (e-mail: [email protected]). Digital Object Identifier 10.1109/TMECH.2004.828648

ASJC Scopus subject areas

Control and Systems Engineering
Computer Science Applications
Electrical and Electronic Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1109/TMECH.2004.828648

Cite this

@article{08c6f1f283574b1fb35da7bb4232658d,

title = "Six-axis nanopositioning device with precision magnetic levitation technoloy",

abstract = "In this paper, we present the design, control, and testing of a 6 degrees-of-freedom magnetically-levitated system with nanometer-precision positioning capability and several-hundred-micrometer travel range. This system levitates a triangular single-moving-part platen, and produces the six-axis motion with six single-axis linear actuators. One of the prominent advantages of this magnetic levitation (maglev) system is that there is no physical contact between the moving part and the stator, which eliminates friction, wear, backlash, and hysteresis. As compared to other traditional devices, the present system is very compact with the minimum number of actuators for six-axis motion generation. The maglev device presented herein shows the position resolution better than 5 nm with 2-nm rms position noise, and is capable of a velocity of 0.5 m/s and an acceleration of 30 m/s2. The nominal power consumption is only 15 mW by each horizontal actuator, and 320 mW by each vertical actuator. The actuators are sized to be able to orient and position a maximum payload of 1 kg. The key application of this maglev device is the manipulation at nanoscale for microassemblies and manufacture of their parts. Other potential applications are stereolithography, vibration-free delicate instrumentation, and microscale rapid prototyping.",

author = "Shobhit Verma and Kim, {Wong jong} and Jie Gu",

note = "Funding Information: Manuscript received April 25, 2003; revised July 29, 2003. This work was supported by the National Science Foundation under Grant CMS-0116642. S. Verma is with the Department of Mechanical Engineering, Texas A&M University, College Station, TX 77840 USA (e-mail: [email protected]). W. Kim is with the Department of Mechanical Engineering, Texas A&M University, College Station, TX 77843-3123 USA (e-mail: [email protected]). J. Gu was with the Mechanical Engineering Department, Texas A&M University, College Station, TX 77840 USA. He is now with the Department of Electrical Engineering, University of Minnesota, Minneapolis, MN 55455 USA (e-mail: [email protected]). Digital Object Identifier 10.1109/TMECH.2004.828648",

year = "2004",

month = jun,

doi = "10.1109/TMECH.2004.828648",

language = "English (US)",

volume = "9",

pages = "384--391",

journal = "IEEE/ASME Transactions on Mechatronics",

issn = "1083-4435",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2",

}

TY - JOUR

T1 - Six-axis nanopositioning device with precision magnetic levitation technoloy

AU - Verma, Shobhit

AU - Kim, Wong jong

AU - Gu, Jie

N1 - Funding Information: Manuscript received April 25, 2003; revised July 29, 2003. This work was supported by the National Science Foundation under Grant CMS-0116642. S. Verma is with the Department of Mechanical Engineering, Texas A&M University, College Station, TX 77840 USA (e-mail: [email protected]). W. Kim is with the Department of Mechanical Engineering, Texas A&M University, College Station, TX 77843-3123 USA (e-mail: [email protected]). J. Gu was with the Mechanical Engineering Department, Texas A&M University, College Station, TX 77840 USA. He is now with the Department of Electrical Engineering, University of Minnesota, Minneapolis, MN 55455 USA (e-mail: [email protected]). Digital Object Identifier 10.1109/TMECH.2004.828648

PY - 2004/6

Y1 - 2004/6

N2 - In this paper, we present the design, control, and testing of a 6 degrees-of-freedom magnetically-levitated system with nanometer-precision positioning capability and several-hundred-micrometer travel range. This system levitates a triangular single-moving-part platen, and produces the six-axis motion with six single-axis linear actuators. One of the prominent advantages of this magnetic levitation (maglev) system is that there is no physical contact between the moving part and the stator, which eliminates friction, wear, backlash, and hysteresis. As compared to other traditional devices, the present system is very compact with the minimum number of actuators for six-axis motion generation. The maglev device presented herein shows the position resolution better than 5 nm with 2-nm rms position noise, and is capable of a velocity of 0.5 m/s and an acceleration of 30 m/s2. The nominal power consumption is only 15 mW by each horizontal actuator, and 320 mW by each vertical actuator. The actuators are sized to be able to orient and position a maximum payload of 1 kg. The key application of this maglev device is the manipulation at nanoscale for microassemblies and manufacture of their parts. Other potential applications are stereolithography, vibration-free delicate instrumentation, and microscale rapid prototyping.

AB - In this paper, we present the design, control, and testing of a 6 degrees-of-freedom magnetically-levitated system with nanometer-precision positioning capability and several-hundred-micrometer travel range. This system levitates a triangular single-moving-part platen, and produces the six-axis motion with six single-axis linear actuators. One of the prominent advantages of this magnetic levitation (maglev) system is that there is no physical contact between the moving part and the stator, which eliminates friction, wear, backlash, and hysteresis. As compared to other traditional devices, the present system is very compact with the minimum number of actuators for six-axis motion generation. The maglev device presented herein shows the position resolution better than 5 nm with 2-nm rms position noise, and is capable of a velocity of 0.5 m/s and an acceleration of 30 m/s2. The nominal power consumption is only 15 mW by each horizontal actuator, and 320 mW by each vertical actuator. The actuators are sized to be able to orient and position a maximum payload of 1 kg. The key application of this maglev device is the manipulation at nanoscale for microassemblies and manufacture of their parts. Other potential applications are stereolithography, vibration-free delicate instrumentation, and microscale rapid prototyping.

UR - http://www.scopus.com/inward/record.url?scp=3342921784&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=3342921784&partnerID=8YFLogxK

U2 - 10.1109/TMECH.2004.828648

DO - 10.1109/TMECH.2004.828648

M3 - Article

AN - SCOPUS:3342921784

SN - 1083-4435

VL - 9

SP - 384

EP - 391

JO - IEEE/ASME Transactions on Mechatronics

JF - IEEE/ASME Transactions on Mechatronics

IS - 2

ER -

Six-axis nanopositioning device with precision magnetic levitation technoloy

Abstract

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ASJC Scopus subject areas

UN SDGs

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