Soft Electron Beam Lithography (Soft-eBL) Patterning of 0- and 1-D Nanostructures of Magnetic and Ferroelectric Oxides

B. Liu*, Vinayak P Dravid

*Corresponding author for this work

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)1024-1025
Number of pages2
JournalMicroscopy and Microanalysis
Volume15
Issue numberSUPPL. 2
DOIs
StatePublished - Jul 1 2009

ASJC Scopus subject areas

  • Instrumentation

Cite this