Soft Electron Beam Lithography (Soft-eBL) Patterning of 0- and 1-D Nanostructures of Magnetic and Ferroelectric Oxides

B. Liu; Vinayak P. Dravid

doi:10.1017/S143192760909655X

Soft Electron Beam Lithography (Soft-eBL) Patterning of 0- and 1-D Nanostructures of Magnetic and Ferroelectric Oxides

B. Liu^*, Vinayak P. Dravid

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	1024-1025
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	15
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/S143192760909655X
State	Published - Jul 2009

ASJC Scopus subject areas

Instrumentation

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10.1017/S143192760909655X

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title = "Soft Electron Beam Lithography (Soft-eBL) Patterning of 0- and 1-D Nanostructures of Magnetic and Ferroelectric Oxides",

author = "B. Liu and Dravid, {Vinayak P.}",

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Soft Electron Beam Lithography (Soft-eBL) Patterning of 0- and 1-D Nanostructures of Magnetic and Ferroelectric Oxides

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