Soft Electron Beam Lithography (Soft-eBL) Patterning of 0- and 1-D Nanostructures of Magnetic and Ferroelectric Oxides

B. Liu*, Vinayak P. Dravid

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Original languageEnglish (US)
Pages (from-to)1024-1025
Number of pages2
JournalMicroscopy and Microanalysis
Issue numberSUPPL. 2
StatePublished - Jul 2009

ASJC Scopus subject areas

  • Instrumentation

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