Abstract
Vibrational resonances of microelectromechanical systems (MEMS) can serve as means for assessing physical properties of ultrathin coatings in sensors and analytical platforms. Most such technologies exist in largely two-dimensional configurations with a limited total number of accessible vibration modes and modal displacements, thereby placing constraints on design options and operational capabilities. This study presents a set of concepts in three-dimensional (3D) microscale platforms with vibrational resonances excited by Lorentz-force actuation for purposes of measuring properties of thin-film coatings. Nanoscale films including photodefinable epoxy, cresol novolak resin, and polymer brush with thicknesses as small as 270 nm serve as the test vehicles for demonstrating the advantages of these 3D MEMS for detection of multiple physical properties, such as modulus and density, within a single polymer sample. The stability and reusability of the structure are demonstrated through multiple measurements of polymer samples using a single platform, and via integration with thermal actuators, the temperature-dependent physical properties of polymer films are assessed. Numerical modeling also suggests the potential for characterization of anisotropic mechanical properties in single or multilayer films. The findings establish unusual opportunities for interrogation of the physical properties of polymers through advanced MEMS design.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 449-457 |
| Number of pages | 9 |
| Journal | ACS nano |
| Volume | 13 |
| Issue number | 1 |
| DOIs | |
| State | Published - Jan 22 2019 |
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Keywords
- anisotropic properties
- lorentz-force actuation
- microelectromechanical systems
- multimodal resonance
- polymer mechanics
- three-dimensional structures
ASJC Scopus subject areas
- Materials Science(all)
- Engineering(all)
- Physics and Astronomy(all)
Cite this
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Soft Three-Dimensional Microscale Vibratory Platforms for Characterization of Nano-Thin Polymer Films. / Nan, Kewang; Wang, Heling; Ning, Xin; Miller, Kali A.; Wei, Chen; Liu, Yunpeng; Li, Haibo; Xue, Yeguang; Xie, Zhaoqian; Luan, Haiwen; Zhang, Yihui; Huang, Yonggang; Rogers, John A; Braun, Paul V.
In: ACS nano, Vol. 13, No. 1, 22.01.2019, p. 449-457.Research output: Contribution to journal › Article
TY - JOUR
T1 - Soft Three-Dimensional Microscale Vibratory Platforms for Characterization of Nano-Thin Polymer Films
AU - Nan, Kewang
AU - Wang, Heling
AU - Ning, Xin
AU - Miller, Kali A.
AU - Wei, Chen
AU - Liu, Yunpeng
AU - Li, Haibo
AU - Xue, Yeguang
AU - Xie, Zhaoqian
AU - Luan, Haiwen
AU - Zhang, Yihui
AU - Huang, Yonggang
AU - Rogers, John A
AU - Braun, Paul V.
PY - 2019/1/22
Y1 - 2019/1/22
N2 - Vibrational resonances of microelectromechanical systems (MEMS) can serve as means for assessing physical properties of ultrathin coatings in sensors and analytical platforms. Most such technologies exist in largely two-dimensional configurations with a limited total number of accessible vibration modes and modal displacements, thereby placing constraints on design options and operational capabilities. This study presents a set of concepts in three-dimensional (3D) microscale platforms with vibrational resonances excited by Lorentz-force actuation for purposes of measuring properties of thin-film coatings. Nanoscale films including photodefinable epoxy, cresol novolak resin, and polymer brush with thicknesses as small as 270 nm serve as the test vehicles for demonstrating the advantages of these 3D MEMS for detection of multiple physical properties, such as modulus and density, within a single polymer sample. The stability and reusability of the structure are demonstrated through multiple measurements of polymer samples using a single platform, and via integration with thermal actuators, the temperature-dependent physical properties of polymer films are assessed. Numerical modeling also suggests the potential for characterization of anisotropic mechanical properties in single or multilayer films. The findings establish unusual opportunities for interrogation of the physical properties of polymers through advanced MEMS design.
AB - Vibrational resonances of microelectromechanical systems (MEMS) can serve as means for assessing physical properties of ultrathin coatings in sensors and analytical platforms. Most such technologies exist in largely two-dimensional configurations with a limited total number of accessible vibration modes and modal displacements, thereby placing constraints on design options and operational capabilities. This study presents a set of concepts in three-dimensional (3D) microscale platforms with vibrational resonances excited by Lorentz-force actuation for purposes of measuring properties of thin-film coatings. Nanoscale films including photodefinable epoxy, cresol novolak resin, and polymer brush with thicknesses as small as 270 nm serve as the test vehicles for demonstrating the advantages of these 3D MEMS for detection of multiple physical properties, such as modulus and density, within a single polymer sample. The stability and reusability of the structure are demonstrated through multiple measurements of polymer samples using a single platform, and via integration with thermal actuators, the temperature-dependent physical properties of polymer films are assessed. Numerical modeling also suggests the potential for characterization of anisotropic mechanical properties in single or multilayer films. The findings establish unusual opportunities for interrogation of the physical properties of polymers through advanced MEMS design.
KW - anisotropic properties
KW - lorentz-force actuation
KW - microelectromechanical systems
KW - multimodal resonance
KW - polymer mechanics
KW - three-dimensional structures
UR - http://www.scopus.com/inward/record.url?scp=85060396073&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85060396073&partnerID=8YFLogxK
U2 - 10.1021/acsnano.8b06736
DO - 10.1021/acsnano.8b06736
M3 - Article
VL - 13
SP - 449
EP - 457
JO - ACS Nano
JF - ACS Nano
SN - 1936-0851
IS - 1
ER -