Soft Three-Dimensional Microscale Vibratory Platforms for Characterization of Nano-Thin Polymer Films

Kewang Nan, Heling Wang, Xin Ning, Kali A. Miller, Chen Wei, Yunpeng Liu, Haibo Li, Yeguang Xue, Zhaoqian Xie, Haiwen Luan, Yihui Zhang, Yonggang Huang*, John A Rogers, Paul V. Braun

*Corresponding author for this work

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Vibrational resonances of microelectromechanical systems (MEMS) can serve as means for assessing physical properties of ultrathin coatings in sensors and analytical platforms. Most such technologies exist in largely two-dimensional configurations with a limited total number of accessible vibration modes and modal displacements, thereby placing constraints on design options and operational capabilities. This study presents a set of concepts in three-dimensional (3D) microscale platforms with vibrational resonances excited by Lorentz-force actuation for purposes of measuring properties of thin-film coatings. Nanoscale films including photodefinable epoxy, cresol novolak resin, and polymer brush with thicknesses as small as 270 nm serve as the test vehicles for demonstrating the advantages of these 3D MEMS for detection of multiple physical properties, such as modulus and density, within a single polymer sample. The stability and reusability of the structure are demonstrated through multiple measurements of polymer samples using a single platform, and via integration with thermal actuators, the temperature-dependent physical properties of polymer films are assessed. Numerical modeling also suggests the potential for characterization of anisotropic mechanical properties in single or multilayer films. The findings establish unusual opportunities for interrogation of the physical properties of polymers through advanced MEMS design.

Original languageEnglish (US)
Pages (from-to)449-457
Number of pages9
JournalACS nano
Volume13
Issue number1
DOIs
StatePublished - Jan 22 2019

Fingerprint

Polymer films
microbalances
Polymers
platforms
Physical properties
MEMS
Thin films
physical properties
cresol
polymers
microelectromechanical systems
Lorentz force
Coatings
Multilayer films
Reusability
test vehicles
Brushes
coatings
cresols
interrogation

Keywords

  • anisotropic properties
  • lorentz-force actuation
  • microelectromechanical systems
  • multimodal resonance
  • polymer mechanics
  • three-dimensional structures

ASJC Scopus subject areas

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Nan, K., Wang, H., Ning, X., Miller, K. A., Wei, C., Liu, Y., ... Braun, P. V. (2019). Soft Three-Dimensional Microscale Vibratory Platforms for Characterization of Nano-Thin Polymer Films. ACS nano, 13(1), 449-457. https://doi.org/10.1021/acsnano.8b06736
Nan, Kewang ; Wang, Heling ; Ning, Xin ; Miller, Kali A. ; Wei, Chen ; Liu, Yunpeng ; Li, Haibo ; Xue, Yeguang ; Xie, Zhaoqian ; Luan, Haiwen ; Zhang, Yihui ; Huang, Yonggang ; Rogers, John A ; Braun, Paul V. / Soft Three-Dimensional Microscale Vibratory Platforms for Characterization of Nano-Thin Polymer Films. In: ACS nano. 2019 ; Vol. 13, No. 1. pp. 449-457.
@article{89893b363aa0431581c20b8ba50821ee,
title = "Soft Three-Dimensional Microscale Vibratory Platforms for Characterization of Nano-Thin Polymer Films",
abstract = "Vibrational resonances of microelectromechanical systems (MEMS) can serve as means for assessing physical properties of ultrathin coatings in sensors and analytical platforms. Most such technologies exist in largely two-dimensional configurations with a limited total number of accessible vibration modes and modal displacements, thereby placing constraints on design options and operational capabilities. This study presents a set of concepts in three-dimensional (3D) microscale platforms with vibrational resonances excited by Lorentz-force actuation for purposes of measuring properties of thin-film coatings. Nanoscale films including photodefinable epoxy, cresol novolak resin, and polymer brush with thicknesses as small as 270 nm serve as the test vehicles for demonstrating the advantages of these 3D MEMS for detection of multiple physical properties, such as modulus and density, within a single polymer sample. The stability and reusability of the structure are demonstrated through multiple measurements of polymer samples using a single platform, and via integration with thermal actuators, the temperature-dependent physical properties of polymer films are assessed. Numerical modeling also suggests the potential for characterization of anisotropic mechanical properties in single or multilayer films. The findings establish unusual opportunities for interrogation of the physical properties of polymers through advanced MEMS design.",
keywords = "anisotropic properties, lorentz-force actuation, microelectromechanical systems, multimodal resonance, polymer mechanics, three-dimensional structures",
author = "Kewang Nan and Heling Wang and Xin Ning and Miller, {Kali A.} and Chen Wei and Yunpeng Liu and Haibo Li and Yeguang Xue and Zhaoqian Xie and Haiwen Luan and Yihui Zhang and Yonggang Huang and Rogers, {John A} and Braun, {Paul V.}",
year = "2019",
month = "1",
day = "22",
doi = "10.1021/acsnano.8b06736",
language = "English (US)",
volume = "13",
pages = "449--457",
journal = "ACS Nano",
issn = "1936-0851",
publisher = "American Chemical Society",
number = "1",

}

Nan, K, Wang, H, Ning, X, Miller, KA, Wei, C, Liu, Y, Li, H, Xue, Y, Xie, Z, Luan, H, Zhang, Y, Huang, Y, Rogers, JA & Braun, PV 2019, 'Soft Three-Dimensional Microscale Vibratory Platforms for Characterization of Nano-Thin Polymer Films', ACS nano, vol. 13, no. 1, pp. 449-457. https://doi.org/10.1021/acsnano.8b06736

Soft Three-Dimensional Microscale Vibratory Platforms for Characterization of Nano-Thin Polymer Films. / Nan, Kewang; Wang, Heling; Ning, Xin; Miller, Kali A.; Wei, Chen; Liu, Yunpeng; Li, Haibo; Xue, Yeguang; Xie, Zhaoqian; Luan, Haiwen; Zhang, Yihui; Huang, Yonggang; Rogers, John A; Braun, Paul V.

In: ACS nano, Vol. 13, No. 1, 22.01.2019, p. 449-457.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Soft Three-Dimensional Microscale Vibratory Platforms for Characterization of Nano-Thin Polymer Films

AU - Nan, Kewang

AU - Wang, Heling

AU - Ning, Xin

AU - Miller, Kali A.

AU - Wei, Chen

AU - Liu, Yunpeng

AU - Li, Haibo

AU - Xue, Yeguang

AU - Xie, Zhaoqian

AU - Luan, Haiwen

AU - Zhang, Yihui

AU - Huang, Yonggang

AU - Rogers, John A

AU - Braun, Paul V.

PY - 2019/1/22

Y1 - 2019/1/22

N2 - Vibrational resonances of microelectromechanical systems (MEMS) can serve as means for assessing physical properties of ultrathin coatings in sensors and analytical platforms. Most such technologies exist in largely two-dimensional configurations with a limited total number of accessible vibration modes and modal displacements, thereby placing constraints on design options and operational capabilities. This study presents a set of concepts in three-dimensional (3D) microscale platforms with vibrational resonances excited by Lorentz-force actuation for purposes of measuring properties of thin-film coatings. Nanoscale films including photodefinable epoxy, cresol novolak resin, and polymer brush with thicknesses as small as 270 nm serve as the test vehicles for demonstrating the advantages of these 3D MEMS for detection of multiple physical properties, such as modulus and density, within a single polymer sample. The stability and reusability of the structure are demonstrated through multiple measurements of polymer samples using a single platform, and via integration with thermal actuators, the temperature-dependent physical properties of polymer films are assessed. Numerical modeling also suggests the potential for characterization of anisotropic mechanical properties in single or multilayer films. The findings establish unusual opportunities for interrogation of the physical properties of polymers through advanced MEMS design.

AB - Vibrational resonances of microelectromechanical systems (MEMS) can serve as means for assessing physical properties of ultrathin coatings in sensors and analytical platforms. Most such technologies exist in largely two-dimensional configurations with a limited total number of accessible vibration modes and modal displacements, thereby placing constraints on design options and operational capabilities. This study presents a set of concepts in three-dimensional (3D) microscale platforms with vibrational resonances excited by Lorentz-force actuation for purposes of measuring properties of thin-film coatings. Nanoscale films including photodefinable epoxy, cresol novolak resin, and polymer brush with thicknesses as small as 270 nm serve as the test vehicles for demonstrating the advantages of these 3D MEMS for detection of multiple physical properties, such as modulus and density, within a single polymer sample. The stability and reusability of the structure are demonstrated through multiple measurements of polymer samples using a single platform, and via integration with thermal actuators, the temperature-dependent physical properties of polymer films are assessed. Numerical modeling also suggests the potential for characterization of anisotropic mechanical properties in single or multilayer films. The findings establish unusual opportunities for interrogation of the physical properties of polymers through advanced MEMS design.

KW - anisotropic properties

KW - lorentz-force actuation

KW - microelectromechanical systems

KW - multimodal resonance

KW - polymer mechanics

KW - three-dimensional structures

UR - http://www.scopus.com/inward/record.url?scp=85060396073&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85060396073&partnerID=8YFLogxK

U2 - 10.1021/acsnano.8b06736

DO - 10.1021/acsnano.8b06736

M3 - Article

VL - 13

SP - 449

EP - 457

JO - ACS Nano

JF - ACS Nano

SN - 1936-0851

IS - 1

ER -