Solution to the surface registration problem using X-ray standing waves

J. A. Golovchenko*, J. R. Patel, D. R. Kaplan, P. L. Cowan, M. J. Bedzyk

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

199 Scopus citations


Standing waves of x rays have been used to determine the positions of bromine atoms in submonolayer coverages on a (111) silicon surface. In addition to the bromine position normal to the crystal surface its components relative to a plane inclined to the surface are also measured. This information suffices to establish the registration of the surface atoms relative to the crystal below.

Original languageEnglish (US)
Pages (from-to)560-563
Number of pages4
JournalPhysical review letters
Issue number8
StatePublished - 1982

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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