Specimen preparation for correlating transmission electron microscopy and atom probe tomography of mesoscale features

Matthew I. Hartshorne, Dieter Isheim, David N. Seidman, Mitra L. Taheri*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

Atom-probe tomography (APT) provides atomic-scale spatial and compositional resolution that is ideally suited for the analysis of grain boundaries. The small sample volume analyzed in APT presents, however, a challenge for capturing mesoscale features, such as grain boundaries. A new site-specific method utilizing transmission electron microscopy (TEM) for the precise selection and isolation of mesoscale microstructural features in a focused-ion-beam (FIB) microscope lift-out sample, from below the original surface of the bulk sample, for targeted preparation of an APT microtip by FIB-SEM microscopy is presented. This methodology is demonstrated for the targeted extraction of a prior austenite grain boundary in a martensitic steel alloy; it can, however, be easily applied to other mesoscale features, such as heterophase interfaces, precipitates, and the tips of cracks.

Original languageEnglish (US)
Pages (from-to)25-32
Number of pages8
JournalUltramicroscopy
Volume147
DOIs
StatePublished - Dec 2014

Keywords

  • Atom probe tomography
  • Focused ion beam
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation

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