Spherical aberration correction in aplanatic solid immersion imaging with adaptive optics

Yang Lu, Euan Ramsay, Christopher R. Stockbridge, Abdulkadir Yurt, M. Selim Ünlü, Thomas G. Bifano, Bennett B. Goldberg

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have developed a wavefront precompensation technique in aplanatic SIL imaging to increase the tolerance of substrate thickness for IC inspection. Spherical aberrations due to the thickness error are corrected using a MEMS deformable mirror.

Original languageEnglish (US)
Title of host publicationFrontiers in Optics, FIO 2012
StatePublished - Dec 1 2012
EventFrontiers in Optics, FIO 2012 - Rochester, NY, United States
Duration: Oct 14 2012Oct 18 2012

Other

OtherFrontiers in Optics, FIO 2012
CountryUnited States
CityRochester, NY
Period10/14/1210/18/12

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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