Spherical aberration correction in aplanatic solid immersion lens imaging using a MEMS deformable mirror

Y. Lu*, E. Ramsay, C. R. Stockbridge, A. Yurt, F. H. Köklü, T. G. Bifano, M. S. Ünlü, B. B. Goldberg

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

Aplanatic solid immersion lens (SIL) microscopy is required to achieve the highest possible resolution for next generation silicon IC backside inspection and failure analysis. However, aplanatic SILs are very susceptible to spherical aberrations introduced by substrate thickness mismatch. We correct this aberration using a MEMS deformable mirror. Good agreement between theory and experiment is achieved and spot intensity increases by a factor of two to three are demonstrated.

Original languageEnglish (US)
Pages (from-to)2120-2122
Number of pages3
JournalMicroelectronics Reliability
Volume52
Issue number9-10
DOIs
StatePublished - Sep 1 2012

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Surfaces, Coatings and Films
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Safety, Risk, Reliability and Quality

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