Spinel humidity sensors prepared by thermal spray direct writing

Kipyung Ahn*, Bruce W. Wessels, Sanjay Sampath

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

37 Scopus citations

Abstract

Ceramic humidity sensors consisting of MgAl2O4 dielectric layer and Ni-5 wt.%Al electrodes were prepared by plasma spray processing and their electrical properties were investigated as a function of the relative humidity. The complex impedance of the sensor was measured at different humidity levels, using impedance spectroscopy. The resistance and the capacitance of the sensor were determined from the impedance plots using equivalent circuit simulations. The resistance of the sensor decreased from 2.4 × 109 to 9 × 105 Ω with increasing the relative humidity from 11 to 98% due to the increase of surface electrical conductivity resulting from water adsorption. The capacitance increased 1-7 nF in the humidity range.

Original languageEnglish (US)
Pages (from-to)342-346
Number of pages5
JournalSensors and Actuators, B: Chemical
Volume107
Issue number1 SPEC. ISS.
DOIs
StatePublished - May 27 2005

Keywords

  • Direct write
  • Humidity sensor
  • Plasma spray
  • Spinel

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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