Spinel humidity sensors prepared by thermal spray direct writing

Kipyung Ahn; Bruce W. Wessels; Sanjay Sampath

doi:10.1016/j.snb.2004.10.020

Spinel humidity sensors prepared by thermal spray direct writing

Kipyung Ahn^*, Bruce W. Wessels, Sanjay Sampath

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

40 Scopus citations

Abstract

Ceramic humidity sensors consisting of MgAl₂O₄ dielectric layer and Ni-5 wt.%Al electrodes were prepared by plasma spray processing and their electrical properties were investigated as a function of the relative humidity. The complex impedance of the sensor was measured at different humidity levels, using impedance spectroscopy. The resistance and the capacitance of the sensor were determined from the impedance plots using equivalent circuit simulations. The resistance of the sensor decreased from 2.4 × 10⁹ to 9 × 10⁵ Ω with increasing the relative humidity from 11 to 98% due to the increase of surface electrical conductivity resulting from water adsorption. The capacitance increased 1-7 nF in the humidity range.

Original language	English (US)
Pages (from-to)	342-346
Number of pages	5
Journal	Sensors and Actuators, B: Chemical
Volume	107
Issue number	1 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.snb.2004.10.020
State	Published - May 27 2005

Keywords

Direct write
Humidity sensor
Plasma spray
Spinel

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/j.snb.2004.10.020

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@article{75cf378ec33a400882b55a852386d160,

title = "Spinel humidity sensors prepared by thermal spray direct writing",

abstract = "Ceramic humidity sensors consisting of MgAl2O4 dielectric layer and Ni-5 wt.%Al electrodes were prepared by plasma spray processing and their electrical properties were investigated as a function of the relative humidity. The complex impedance of the sensor was measured at different humidity levels, using impedance spectroscopy. The resistance and the capacitance of the sensor were determined from the impedance plots using equivalent circuit simulations. The resistance of the sensor decreased from 2.4 × 109 to 9 × 105 Ω with increasing the relative humidity from 11 to 98% due to the increase of surface electrical conductivity resulting from water adsorption. The capacitance increased 1-7 nF in the humidity range.",

keywords = "Direct write, Humidity sensor, Plasma spray, Spinel",

author = "Kipyung Ahn and Wessels, {Bruce W.} and Sanjay Sampath",

note = "Funding Information: The authors thank Zachary Homrighaus for assistance in impedance measurements. This work was supported by the MICE program, the Defense Advanced Research Projects Agency and Office of Naval Research (DARPA/ONR) award N000140010654. The authors also acknowledge use of the central facilities of the Materials Research Center at Northwestern University supported by the MRSEC program under NSF grant (DMR-0076097). ",

year = "2005",

month = may,

day = "27",

doi = "10.1016/j.snb.2004.10.020",

language = "English (US)",

volume = "107",

pages = "342--346",

journal = "Sensors and Actuators B: Chemical",

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publisher = "Elsevier",

number = "1 SPEC. ISS.",

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TY - JOUR

T1 - Spinel humidity sensors prepared by thermal spray direct writing

AU - Ahn, Kipyung

AU - Wessels, Bruce W.

AU - Sampath, Sanjay

N1 - Funding Information: The authors thank Zachary Homrighaus for assistance in impedance measurements. This work was supported by the MICE program, the Defense Advanced Research Projects Agency and Office of Naval Research (DARPA/ONR) award N000140010654. The authors also acknowledge use of the central facilities of the Materials Research Center at Northwestern University supported by the MRSEC program under NSF grant (DMR-0076097).

PY - 2005/5/27

Y1 - 2005/5/27

N2 - Ceramic humidity sensors consisting of MgAl2O4 dielectric layer and Ni-5 wt.%Al electrodes were prepared by plasma spray processing and their electrical properties were investigated as a function of the relative humidity. The complex impedance of the sensor was measured at different humidity levels, using impedance spectroscopy. The resistance and the capacitance of the sensor were determined from the impedance plots using equivalent circuit simulations. The resistance of the sensor decreased from 2.4 × 109 to 9 × 105 Ω with increasing the relative humidity from 11 to 98% due to the increase of surface electrical conductivity resulting from water adsorption. The capacitance increased 1-7 nF in the humidity range.

AB - Ceramic humidity sensors consisting of MgAl2O4 dielectric layer and Ni-5 wt.%Al electrodes were prepared by plasma spray processing and their electrical properties were investigated as a function of the relative humidity. The complex impedance of the sensor was measured at different humidity levels, using impedance spectroscopy. The resistance and the capacitance of the sensor were determined from the impedance plots using equivalent circuit simulations. The resistance of the sensor decreased from 2.4 × 109 to 9 × 105 Ω with increasing the relative humidity from 11 to 98% due to the increase of surface electrical conductivity resulting from water adsorption. The capacitance increased 1-7 nF in the humidity range.

KW - Direct write

KW - Humidity sensor

KW - Plasma spray

KW - Spinel

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DO - 10.1016/j.snb.2004.10.020

M3 - Article

AN - SCOPUS:18544380363

SN - 0925-4005

VL - 107

SP - 342

EP - 346

JO - Sensors and Actuators B: Chemical

JF - Sensors and Actuators B: Chemical

IS - 1 SPEC. ISS.

ER -

Spinel humidity sensors prepared by thermal spray direct writing

Abstract

Keywords

ASJC Scopus subject areas

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