Spring-on-tip nanolithography probes

Xuefeng Wang*, Loren Vincent, Chang Liu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a new scanning nanolithography probe with spring-on-tip design. Conventional scanning probes consist of cantilevers with tips at distal ends. The cantilevers provide necessary spring softness for the tips. Unlike traditional pyramidal-shaped scanning tips with solid faces, the sidewalls of the new reported tips are modified to contain folded spring structures to reduce the overall force constants of the scanning probes. We used nano-resolution focused ion beam milling to modify micrometer-sized solid faces of traditional tips. This allows greater tip integration density while achieving low force constants. Designs are optimized using finite element simulation. We also demonstrated sub-100-nm scanning probe lithography using such nanolithography probes.

Original languageEnglish (US)
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages202-205
Number of pages4
StatePublished - Oct 24 2006
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: Jan 22 2006Jan 26 2006

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period1/22/061/26/06

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Spring-on-tip nanolithography probes'. Together they form a unique fingerprint.

Cite this