TY - GEN
T1 - Spring-on-tip nanolithography probes
AU - Wang, Xuefeng
AU - Vincent, Loren
AU - Liu, Chang
PY - 2006/10/24
Y1 - 2006/10/24
N2 - This paper reports a new scanning nanolithography probe with spring-on-tip design. Conventional scanning probes consist of cantilevers with tips at distal ends. The cantilevers provide necessary spring softness for the tips. Unlike traditional pyramidal-shaped scanning tips with solid faces, the sidewalls of the new reported tips are modified to contain folded spring structures to reduce the overall force constants of the scanning probes. We used nano-resolution focused ion beam milling to modify micrometer-sized solid faces of traditional tips. This allows greater tip integration density while achieving low force constants. Designs are optimized using finite element simulation. We also demonstrated sub-100-nm scanning probe lithography using such nanolithography probes.
AB - This paper reports a new scanning nanolithography probe with spring-on-tip design. Conventional scanning probes consist of cantilevers with tips at distal ends. The cantilevers provide necessary spring softness for the tips. Unlike traditional pyramidal-shaped scanning tips with solid faces, the sidewalls of the new reported tips are modified to contain folded spring structures to reduce the overall force constants of the scanning probes. We used nano-resolution focused ion beam milling to modify micrometer-sized solid faces of traditional tips. This allows greater tip integration density while achieving low force constants. Designs are optimized using finite element simulation. We also demonstrated sub-100-nm scanning probe lithography using such nanolithography probes.
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M3 - Conference contribution
AN - SCOPUS:33750117535
SN - 0780394755
SN - 9780780394759
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 202
EP - 205
BT - 19th IEEE International Conference on Micro Electro Mechanical Systems
T2 - 19th IEEE International Conference on Micro Electro Mechanical Systems
Y2 - 22 January 2006 through 26 January 2006
ER -