Spurious mode suppression via apodization for 1 GHz AlN Contour-Mode Resonators

Marco Giovannini; Serkan Yazici; Nai Kuei Kuo; Gianluca Piazza

doi:10.1109/FCS.2012.6243626

Spurious mode suppression via apodization for 1 GHz AlN Contour-Mode Resonators

Marco Giovannini^*, Serkan Yazici, Nai Kuei Kuo, Gianluca Piazza

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

21 Scopus citations

Abstract

This paper reports, for the first time, on the application of apodization techniques to 1 GHz MEMS AlN Contour-Mode Resonators (CMRs [1]) to efficiently suppress spurious modes in close proximity of the main mechanical resonance. This concept has been applied with excellent results to a variety of one port resonators formed by patterned top electrodes made out of Aluminum, and a floating bottom electrode made out of Platinum sandwiching the AlN film. As also predicted by 3D COMSOL simulations, a complete elimination of spurious responses in the admittance plot of these resonators is attained without impacting their quality factor and electromechanical coupling coefficient.

Original language	English (US)
Title of host publication	2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings
Pages	650-654
Number of pages	5
DOIs	https://doi.org/10.1109/FCS.2012.6243626
State	Published - 2012
Externally published	Yes
Event	2012 66th IEEE International Frequency Control Symposium, IFCS 2012 - Baltimore, MD, United States Duration: May 21 2012 → May 24 2012

Publication series

Name	2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings

Conference

Conference	2012 66th IEEE International Frequency Control Symposium, IFCS 2012
Country/Territory	United States
City	Baltimore, MD
Period	5/21/12 → 5/24/12

ASJC Scopus subject areas

Electrical and Electronic Engineering
Acoustics and Ultrasonics

Access to Document

10.1109/FCS.2012.6243626

Cite this

Giovannini, M., Yazici, S., Kuo, N. K., & Piazza, G. (2012). Spurious mode suppression via apodization for 1 GHz AlN Contour-Mode Resonators. In 2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings (pp. 650-654). Article 6243626 (2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings). https://doi.org/10.1109/FCS.2012.6243626

@inproceedings{7cdbe0c7693f4012a8b1cfec24400c7a,

title = "Spurious mode suppression via apodization for 1 GHz AlN Contour-Mode Resonators",

abstract = "This paper reports, for the first time, on the application of apodization techniques to 1 GHz MEMS AlN Contour-Mode Resonators (CMRs [1]) to efficiently suppress spurious modes in close proximity of the main mechanical resonance. This concept has been applied with excellent results to a variety of one port resonators formed by patterned top electrodes made out of Aluminum, and a floating bottom electrode made out of Platinum sandwiching the AlN film. As also predicted by 3D COMSOL simulations, a complete elimination of spurious responses in the admittance plot of these resonators is attained without impacting their quality factor and electromechanical coupling coefficient.",

author = "Marco Giovannini and Serkan Yazici and Kuo, {Nai Kuei} and Gianluca Piazza",

year = "2012",

doi = "10.1109/FCS.2012.6243626",

language = "English (US)",

isbn = "9781457718199",

series = "2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings",

pages = "650--654",

booktitle = "2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings",

note = "2012 66th IEEE International Frequency Control Symposium, IFCS 2012 ; Conference date: 21-05-2012 Through 24-05-2012",

}

Giovannini, M, Yazici, S, Kuo, NK & Piazza, G 2012, Spurious mode suppression via apodization for 1 GHz AlN Contour-Mode Resonators. in 2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings., 6243626, 2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings, pp. 650-654, 2012 66th IEEE International Frequency Control Symposium, IFCS 2012, Baltimore, MD, United States, 5/21/12. https://doi.org/10.1109/FCS.2012.6243626

Spurious mode suppression via apodization for 1 GHz AlN Contour-Mode Resonators. / Giovannini, Marco; Yazici, Serkan; Kuo, Nai Kuei et al.
2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings. 2012. p. 650-654 6243626 (2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Spurious mode suppression via apodization for 1 GHz AlN Contour-Mode Resonators

AU - Giovannini, Marco

AU - Yazici, Serkan

AU - Kuo, Nai Kuei

AU - Piazza, Gianluca

PY - 2012

Y1 - 2012

N2 - This paper reports, for the first time, on the application of apodization techniques to 1 GHz MEMS AlN Contour-Mode Resonators (CMRs [1]) to efficiently suppress spurious modes in close proximity of the main mechanical resonance. This concept has been applied with excellent results to a variety of one port resonators formed by patterned top electrodes made out of Aluminum, and a floating bottom electrode made out of Platinum sandwiching the AlN film. As also predicted by 3D COMSOL simulations, a complete elimination of spurious responses in the admittance plot of these resonators is attained without impacting their quality factor and electromechanical coupling coefficient.

AB - This paper reports, for the first time, on the application of apodization techniques to 1 GHz MEMS AlN Contour-Mode Resonators (CMRs [1]) to efficiently suppress spurious modes in close proximity of the main mechanical resonance. This concept has been applied with excellent results to a variety of one port resonators formed by patterned top electrodes made out of Aluminum, and a floating bottom electrode made out of Platinum sandwiching the AlN film. As also predicted by 3D COMSOL simulations, a complete elimination of spurious responses in the admittance plot of these resonators is attained without impacting their quality factor and electromechanical coupling coefficient.

UR - http://www.scopus.com/inward/record.url?scp=84866644446&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84866644446&partnerID=8YFLogxK

U2 - 10.1109/FCS.2012.6243626

DO - 10.1109/FCS.2012.6243626

M3 - Conference contribution

AN - SCOPUS:84866644446

SN - 9781457718199

T3 - 2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings

SP - 650

EP - 654

BT - 2012 IEEE International Frequency Control Symposium, IFCS 2012, Proceedings

T2 - 2012 66th IEEE International Frequency Control Symposium, IFCS 2012

Y2 - 21 May 2012 through 24 May 2012

ER -

Spurious mode suppression via apodization for 1 GHz AlN Contour-Mode Resonators

Abstract

Publication series

Conference

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this