Sputter deposition of yttria-stabilized zirconia and silver cermet electrodes for SOFC applications

L. S. Wang*, E. S. Thiele, S. A. Barnett

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

39 Scopus citations


Yttria-stabilized zirconia (YSZ) thin films were deposited by reactive magnetron sputter deposition from a composite Zr-Y target in Ar-O2 mixtures. YSZ deposition rates of 2.7 μm h-1 were obtained at a sputter source power of 150 W. Deposition with total pressures from 3 to 20 mTorr yielded continuous, crack-free films in a compressive state of stres. X-ray diffraction and electron microscopy results showed that the films were polycrystalline cubic YSZ with a columnar structure and an average grain diameter of 15nm. Fully dense films were obtained at a deposition temperature of 350°C. Temperature-dependent impedance spectroscopy analysis of YSZ films with silver electrodes showed that the oxygen-ion conductivity was as expected for YSZ. Ag1-x[(Y2O3)0.1(ZrO2)0.9]x cermet thin films havew been deposited by reactive magnetron co-sputtering silver and Zr/Y targets in Ar-O2 mixtures. The resistivity ρ{variant} of as-deposited and annealed films as a function od silver volume fraction {cauchy integral}Ag varied over several orders of magnitude. Evaporation of silver from cermet films. observed during long-term annealing at 750°C, was eliminated by depositing a 1 μm thick Sr-doped LaCoO3 cap layer on the cermet. The cermet with {cauchy integral}Ag≈0.5 is a promising air electrode material for solid oxide devices operating at temperatures <-705°C, exhibiting both low resistivity (1×10-4Ω cm) and high thermal stability.

Original languageEnglish (US)
Pages (from-to)261-267
Number of pages7
JournalSolid State Ionics
Issue number1-3
StatePublished - May 1992

ASJC Scopus subject areas

  • General Chemistry
  • General Materials Science
  • Condensed Matter Physics


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