Abstract
The high-pressure rocksalt structure of AlN was stabilized in epitaxial AlN/TiN(001) superlattices with AlN layer thickness ≤2.0 nm. The AlN layers were shown to be pure rocksalt-structure AlN, with a stress-free lattice parameter of 0.408 ± 0.002 nm, using x-ray diffraction, transmission electron microscopy, and electron energy loss spectroscopy. The stable hexagonal phase was observed for AlN layer thickness > 2 nm. The rocksalt structure formed at small layer thicknesses since it provided lower AlN/TiN interfacial energy than the hexagonal or zinc-blende structures.
Original language | English (US) |
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Pages (from-to) | 1743-1746 |
Number of pages | 4 |
Journal | Physical review letters |
Volume | 78 |
Issue number | 9 |
DOIs | |
State | Published - Mar 3 1997 |
ASJC Scopus subject areas
- Physics and Astronomy(all)