Stabilization of cubic AlN in epitaxial AlN/TiN superlattices

A. Madan, I. W. Kim, S. C. Cheng, P. Yashar, V. P. Dravid, S. A. Barnett

Research output: Contribution to journalArticlepeer-review

256 Scopus citations


The high-pressure rocksalt structure of AlN was stabilized in epitaxial AlN/TiN(001) superlattices with AlN layer thickness ≤2.0 nm. The AlN layers were shown to be pure rocksalt-structure AlN, with a stress-free lattice parameter of 0.408 ± 0.002 nm, using x-ray diffraction, transmission electron microscopy, and electron energy loss spectroscopy. The stable hexagonal phase was observed for AlN layer thickness > 2 nm. The rocksalt structure formed at small layer thicknesses since it provided lower AlN/TiN interfacial energy than the hexagonal or zinc-blende structures.

Original languageEnglish (US)
Pages (from-to)1743-1746
Number of pages4
JournalPhysical review letters
Issue number9
StatePublished - Mar 3 1997

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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