Stabilization of cubic CrN0.6 in CrN0.6/TiN superlattices

P. Yashar; X. Chu; S. A. Barnett; J. Rechner; Y. Y. Wang; M. S. Wong; W. D. Sproul

doi:10.1063/1.120621

Stabilization of cubic CrN_0.6 in CrN_0.6/TiN superlattices

P. Yashar^*, X. Chu, S. A. Barnett, J. Rechner, Y. Y. Wang, M. S. Wong, W. D. Sproul

^*Corresponding author for this work

MRC - Materials Research Center

Research output: Contribution to journal › Article › peer-review

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Abstract

A transmission electron microscopy study of CrN_0.6/TiN superlattices deposited by reactive magnetron sputtering is described. The stable structure of CrN_0.60 is hexagonal, but high resolution transmission electron microscopy images of the superlattices showed that CrN_0.6 layers ≤10 nm thick were cubic, while 50 nm thick layers were hexagonal. That is, the cubic CrN structure was "epitaxially stabilized" by the cubic TiN, with which there is a 2.4% lattice mismatch. The superlattices with hexagonal CrN_0.6 showed high strains and defect densities within ≈5 nm of each interface, presumably due to the 5.4% volume decrease associated with the cubic-to-hexagonal transformation. The effect of this strain on the transformation is discussed.

Original language	English (US)
Pages (from-to)	987-989
Number of pages	3
Journal	Applied Physics Letters
Volume	72
Issue number	8
DOIs	https://doi.org/10.1063/1.120621
State	Published - 1998

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Stabilization of cubic CrN0.6 in CrN0.6/TiN superlattices",

abstract = "A transmission electron microscopy study of CrN0.6/TiN superlattices deposited by reactive magnetron sputtering is described. The stable structure of CrN0.60 is hexagonal, but high resolution transmission electron microscopy images of the superlattices showed that CrN0.6 layers ≤10 nm thick were cubic, while 50 nm thick layers were hexagonal. That is, the cubic CrN structure was {"}epitaxially stabilized{"} by the cubic TiN, with which there is a 2.4% lattice mismatch. The superlattices with hexagonal CrN0.6 showed high strains and defect densities within ≈5 nm of each interface, presumably due to the 5.4% volume decrease associated with the cubic-to-hexagonal transformation. The effect of this strain on the transformation is discussed.",

author = "P. Yashar and X. Chu and Barnett, {S. A.} and J. Rechner and Wang, {Y. Y.} and Wong, {M. S.} and Sproul, {W. D.}",

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volume = "72",

pages = "987--989",

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TY - JOUR

T1 - Stabilization of cubic CrN0.6 in CrN0.6/TiN superlattices

AU - Yashar, P.

AU - Chu, X.

AU - Barnett, S. A.

AU - Rechner, J.

AU - Wang, Y. Y.

AU - Wong, M. S.

AU - Sproul, W. D.

PY - 1998

Y1 - 1998

N2 - A transmission electron microscopy study of CrN0.6/TiN superlattices deposited by reactive magnetron sputtering is described. The stable structure of CrN0.60 is hexagonal, but high resolution transmission electron microscopy images of the superlattices showed that CrN0.6 layers ≤10 nm thick were cubic, while 50 nm thick layers were hexagonal. That is, the cubic CrN structure was "epitaxially stabilized" by the cubic TiN, with which there is a 2.4% lattice mismatch. The superlattices with hexagonal CrN0.6 showed high strains and defect densities within ≈5 nm of each interface, presumably due to the 5.4% volume decrease associated with the cubic-to-hexagonal transformation. The effect of this strain on the transformation is discussed.

AB - A transmission electron microscopy study of CrN0.6/TiN superlattices deposited by reactive magnetron sputtering is described. The stable structure of CrN0.60 is hexagonal, but high resolution transmission electron microscopy images of the superlattices showed that CrN0.6 layers ≤10 nm thick were cubic, while 50 nm thick layers were hexagonal. That is, the cubic CrN structure was "epitaxially stabilized" by the cubic TiN, with which there is a 2.4% lattice mismatch. The superlattices with hexagonal CrN0.6 showed high strains and defect densities within ≈5 nm of each interface, presumably due to the 5.4% volume decrease associated with the cubic-to-hexagonal transformation. The effect of this strain on the transformation is discussed.

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Stabilization of cubic CrN_0.6 in CrN_0.6/TiN superlattices

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