Stabilization of cubic CrN0.6 in CrN0.6/TiN superlattices

P. Yashar*, X. Chu, Scott A Barnett, J. Rechner, Y. Y. Wang, M. S. Wong, W. D. Sproul

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

48 Scopus citations


A transmission electron microscopy study of CrN0.6/TiN superlattices deposited by reactive magnetron sputtering is described. The stable structure of CrN0.60 is hexagonal, but high resolution transmission electron microscopy images of the superlattices showed that CrN0.6 layers ≤10 nm thick were cubic, while 50 nm thick layers were hexagonal. That is, the cubic CrN structure was "epitaxially stabilized" by the cubic TiN, with which there is a 2.4% lattice mismatch. The superlattices with hexagonal CrN0.6 showed high strains and defect densities within ≈5 nm of each interface, presumably due to the 5.4% volume decrease associated with the cubic-to-hexagonal transformation. The effect of this strain on the transformation is discussed.

Original languageEnglish (US)
Pages (from-to)987-989
Number of pages3
JournalApplied Physics Letters
Issue number8
StatePublished - Dec 1 1998

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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