Stabilization of ferroelectric phase in tungsten capped Hf_0.8Zr_0.2O₂

Keyphrases

• Tungsten 100%
• Ferroelectric Phase 100%
• Crystallization 50%
• Energy Dispersive X-ray Spectroscopy 50%
• Annealing 50%
• Voltage Measurement 50%
• High-resolution Transmission Electron Microscopy (HRTEM) 50%
• Electron Energy 50%
• Bottom Electrode 50%
• Metal-insulator-metal 50%
• X-ray Diffraction (XRD) Analysis 50%
• Capping Layer 50%
• Electrical Polarization 50%
• CexZr1-xO2 50%
• Orthorhombic Phase 50%
• Metal-insulator-semiconductor Structures 50%
• Metal-insulator-metal Capacitor 50%
• Highly Doped Si 50%
• Polarization Voltage 50%

Material Science

• Tungsten 100%
• Ferroelectric Material 100%
• Ferroelectricity 66%
• X Ray Diffraction Analysis 33%
• Semiconductor Structure 33%
• Capacitor 33%
• Energy-Dispersive X-Ray Spectroscopy 33%
• High-Resolution Transmission Electron Microscopy 33%