Stabilization of Low Valent Zirconium Nitrides in Titanium Nitride via Plasma-Enhanced Atomic Layer Deposition and Assessment of Electrochemical Properties

Hyunho Noh, Nari Jeon, Alex B.F. Martinson, Joseph T. Hupp*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

The increasing awareness of metal nitrides as feasible electrocatalysts in numerous energy-relevant transformations motivates greater synthetic control of mixed metal nitride compositions and their valence states. We report plasma-enhanced atomic layer deposition of titanium zirconium nitride, with an emphasis on the experimental parameters that influence the valence states of the two metal ions. We further examined the consequence of various ratios of Ti and Zr on the electrochemically active surface areas (ECSAs). Films with a Zr-to-Ti ratio of 1:2 or 1:1 yielded the highest ECSA; deviation from these values led to a large fraction of electrically insulating or semiconducting titanium or zirconium oxynitrides/oxides. The systematic examination establishes a fundamental structure-property relationship critical to assessing the electrochemical/electrocatalytic properties of metal nitrides.

Original languageEnglish (US)
Pages (from-to)5095-5100
Number of pages6
JournalACS Applied Energy Materials
Volume3
Issue number6
DOIs
StatePublished - Jun 22 2020

Keywords

  • electrochemically active surface area
  • plasma-enhanced atomic layer deposition
  • structure-property relationship
  • titanium nitride
  • zirconium nitride

ASJC Scopus subject areas

  • Chemical Engineering (miscellaneous)
  • Energy Engineering and Power Technology
  • Electrochemistry
  • Materials Chemistry
  • Electrical and Electronic Engineering

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