Stabilization of zinc-blende cubic AlN in AlN/W superlattices

I. W. Kim; A. Madan; M. W. Guruz; V. P. Dravid; S. A. Barnett

doi:10.1116/1.1372897

Stabilization of zinc-blende cubic AlN in AlN/W superlattices

I. W. Kim^*, A. Madan, M. W. Guruz, V. P. Dravid, S. A. Barnett

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

Aluminium nitride (AIN)/tungsten (W) superlattices with bilayer periods of 3.5-7 nm were grown on magnesium oxide (MgO) using magnetron sputtering. The cubic phase of AlN was observed using high resolution cross-sectional transmission electron microscopy and x-ray diffraction (XRD). The pole figure XRD showed the reflection that matched the theoretically predicted interplanar spacing of zinc-blende phase (Zn-AlN). The XRD scans showed rapid decrease in satellite peak intensities when thickness was increased above 1.5 nm.

Original language	English (US)
Pages (from-to)	2069-2073
Number of pages	5
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	19
Issue number	5
DOIs	https://doi.org/10.1116/1.1372897
State	Published - Sep 2001

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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abstract = "Aluminium nitride (AIN)/tungsten (W) superlattices with bilayer periods of 3.5-7 nm were grown on magnesium oxide (MgO) using magnetron sputtering. The cubic phase of AlN was observed using high resolution cross-sectional transmission electron microscopy and x-ray diffraction (XRD). The pole figure XRD showed the reflection that matched the theoretically predicted interplanar spacing of zinc-blende phase (Zn-AlN). The XRD scans showed rapid decrease in satellite peak intensities when thickness was increased above 1.5 nm.",

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AU - Kim, I. W.

AU - Madan, A.

AU - Guruz, M. W.

AU - Dravid, V. P.

AU - Barnett, S. A.

PY - 2001/9

Y1 - 2001/9

N2 - Aluminium nitride (AIN)/tungsten (W) superlattices with bilayer periods of 3.5-7 nm were grown on magnesium oxide (MgO) using magnetron sputtering. The cubic phase of AlN was observed using high resolution cross-sectional transmission electron microscopy and x-ray diffraction (XRD). The pole figure XRD showed the reflection that matched the theoretically predicted interplanar spacing of zinc-blende phase (Zn-AlN). The XRD scans showed rapid decrease in satellite peak intensities when thickness was increased above 1.5 nm.

AB - Aluminium nitride (AIN)/tungsten (W) superlattices with bilayer periods of 3.5-7 nm were grown on magnesium oxide (MgO) using magnetron sputtering. The cubic phase of AlN was observed using high resolution cross-sectional transmission electron microscopy and x-ray diffraction (XRD). The pole figure XRD showed the reflection that matched the theoretically predicted interplanar spacing of zinc-blende phase (Zn-AlN). The XRD scans showed rapid decrease in satellite peak intensities when thickness was increased above 1.5 nm.

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Stabilization of zinc-blende cubic AlN in AlN/W superlattices

Abstract

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