Stabilization of zinc-blende cubic AlN in AlN/W superlattices

I. W. Kim*, A. Madan, M. W. Guruz, Vinayak P Dravid, Scott A Barnett

*Corresponding author for this work

Research output: Contribution to journalArticle

15 Scopus citations

Abstract

Aluminium nitride (AIN)/tungsten (W) superlattices with bilayer periods of 3.5-7 nm were grown on magnesium oxide (MgO) using magnetron sputtering. The cubic phase of AlN was observed using high resolution cross-sectional transmission electron microscopy and x-ray diffraction (XRD). The pole figure XRD showed the reflection that matched the theoretically predicted interplanar spacing of zinc-blende phase (Zn-AlN). The XRD scans showed rapid decrease in satellite peak intensities when thickness was increased above 1.5 nm.

Original languageEnglish (US)
Pages (from-to)2069-2073
Number of pages5
JournalJournal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume19
Issue number5
DOIs
StatePublished - Sep 1 2001

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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