Stiction Problems in Releasing of 3D Microstructures and Its Solution

Dongmin Wu*, Nicholas Fang, Cheng Sun, Xiang Zhang

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

Abstract

Micro-stereolithography (μSL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical μSL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion.

Original languageEnglish (US)
Pages (from-to)40-48
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5225
StatePublished - Dec 1 2003
EventNano- and Micro-Optics for Information Systems - San Diego, CA, United States
Duration: Aug 3 2003Aug 4 2003

Keywords

  • MEMS
  • Micro stereolithography
  • Photo polymerization
  • Polymer
  • Surface tension

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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