Stiction problems in releasing of 3D microstructures and its solution

Dongmin Wu, Nicholas Fang, Cheng Sun, Xiang Zhang*

*Corresponding author for this work

Research output: Contribution to journalArticle

43 Scopus citations

Abstract

Micro-stereolithography (μSL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical μSL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion.

Original languageEnglish (US)
Pages (from-to)109-115
Number of pages7
JournalSensors and Actuators, A: Physical
Volume128
Issue number1
DOIs
StatePublished - Mar 31 2006

Keywords

  • MEMS
  • Micro-stereolithography
  • Photopolymerization
  • Surface tension

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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