Strain in epitaxial BaTiO3 thin films prepared by MOCVD

S. Chattopadhyay; A. Teren; Bruce W Wessels

Strain in epitaxial BaTiO₃ thin films prepared by MOCVD

S. Chattopadhyay^*, A. Teren, Bruce W Wessels

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

The microstrain in epitaxial BaTiO₃ thin films has been investigated using x-ray diffraction. The full width half maximum of the (001) diffraction peaks ranged from 0.12 to 0.49 deg. From the analysis of the angular dependence of the diffraction peak broadening, it is concluded that the broadening is due predominantly to strain. The magnitude of the microstrain decreases sharply with increasing film thickness.

Original language	English (US)
Pages (from-to)	489-494
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	541
State	Published - Jan 1 1999
Event	Proceedings of the 1998 MRS Fall Meeting - The Symposium 'Advanced Catalytic Materials-1998' - Boston, MA, USA Duration: Nov 30 1998 → Dec 3 1998

ASJC Scopus subject areas

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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title = "Strain in epitaxial BaTiO3 thin films prepared by MOCVD",

abstract = "The microstrain in epitaxial BaTiO3 thin films has been investigated using x-ray diffraction. The full width half maximum of the (001) diffraction peaks ranged from 0.12 to 0.49 deg. From the analysis of the angular dependence of the diffraction peak broadening, it is concluded that the broadening is due predominantly to strain. The magnitude of the microstrain decreases sharply with increasing film thickness.",

author = "S. Chattopadhyay and A. Teren and Wessels, {Bruce W}",

year = "1999",

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AU - Chattopadhyay, S.

AU - Teren, A.

AU - Wessels, Bruce W

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N2 - The microstrain in epitaxial BaTiO3 thin films has been investigated using x-ray diffraction. The full width half maximum of the (001) diffraction peaks ranged from 0.12 to 0.49 deg. From the analysis of the angular dependence of the diffraction peak broadening, it is concluded that the broadening is due predominantly to strain. The magnitude of the microstrain decreases sharply with increasing film thickness.

AB - The microstrain in epitaxial BaTiO3 thin films has been investigated using x-ray diffraction. The full width half maximum of the (001) diffraction peaks ranged from 0.12 to 0.49 deg. From the analysis of the angular dependence of the diffraction peak broadening, it is concluded that the broadening is due predominantly to strain. The magnitude of the microstrain decreases sharply with increasing film thickness.

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JO - Materials Research Society Symposium - Proceedings

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T2 - Proceedings of the 1998 MRS Fall Meeting - The Symposium 'Advanced Catalytic Materials-1998'

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