Strain in epitaxial BaTiO3 thin films prepared by MOCVD

S. Chattopadhyay*, A. Teren, Bruce W Wessels

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


The microstrain in epitaxial BaTiO3 thin films has been investigated using x-ray diffraction. The full width half maximum of the (001) diffraction peaks ranged from 0.12 to 0.49 deg. From the analysis of the angular dependence of the diffraction peak broadening, it is concluded that the broadening is due predominantly to strain. The magnitude of the microstrain decreases sharply with increasing film thickness.

Original languageEnglish (US)
Pages (from-to)489-494
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
StatePublished - Jan 1 1999
EventProceedings of the 1998 MRS Fall Meeting - The Symposium 'Advanced Catalytic Materials-1998' - Boston, MA, USA
Duration: Nov 30 1998Dec 3 1998

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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