Abstract
The microstrain in epitaxial BaTiO3 thin films has been investigated using x-ray diffraction. The full width half maximum of the (001) diffraction peaks ranged from 0.12 to 0.49 deg. From the analysis of the angular dependence of the diffraction peak broadening, it is concluded that the broadening is due predominantly to strain. The magnitude of the microstrain decreases sharply with increasing film thickness.
Original language | English (US) |
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Pages (from-to) | 489-494 |
Number of pages | 6 |
Journal | Materials Research Society Symposium - Proceedings |
Volume | 541 |
State | Published - Jan 1 1999 |
Event | Proceedings of the 1998 MRS Fall Meeting - The Symposium 'Advanced Catalytic Materials-1998' - Boston, MA, USA Duration: Nov 30 1998 → Dec 3 1998 |
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering