Strain sensitivity enhancement of thin metal film strain gauges on polymer microscale structures

J. Engel*, J. Chen, C. Liu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

17 Scopus citations

Abstract

Arrays of identical polyimide cantilever beams have been fabricated with nickel-chrome strain gauges covering an increasing portion of the beam. In contrast to accepted beam models, testing showed that gauge factor increased 136% for polyimide beams as the strain gauge extended over a larger length of the beam. This effect is due to the high modulus of the thin film strain gauges relative to the polymer beams, a hypothesis supported by duplicate experiments with silicon nitride beams that showed a 65% reduction in gauge factor. Comparison with an analytical model and finite element analysis is also made, giving good agreement.

Original languageEnglish (US)
Article number221907
JournalApplied Physics Letters
Volume89
Issue number22
DOIs
StatePublished - Dec 7 2006

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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