Abstract
Self-assembled InGaN quantum dots (QDs) were grown on GaN templates by metalorganic chemical vapor deposition. 2D-3D growth mode transition through Stranski-Krastanov mode was observed via atomic force microscopy. The critical thickness for In0.67Ga0.33N QDs was determined to be four monolayers. The effects of growth temperature, deposition thickness, and V/III ratio on QD formation were examined. The capping of InGaN QDs with GaN was analyzed. Optimized InGaN quantum dots emitted in green spectra at room temperature.
Original language | English (US) |
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Pages (from-to) | 403-408 |
Number of pages | 6 |
Journal | Applied Physics A: Materials Science and Processing |
Volume | 96 |
Issue number | 2 |
DOIs | |
State | Published - Aug 1 2009 |
ASJC Scopus subject areas
- Chemistry(all)
- Materials Science(all)