Stress focusing for controlled fracture in microelectromechanical systems

Matthew A. Meitl; Xue Feng; Jingyan Dong; Etienne Menard; Placid M. Ferreira; Yonggang Huang; John A. Rogers

doi:10.1063/1.2679072

Stress focusing for controlled fracture in microelectromechanical systems

Matthew A. Meitl^*, Xue Feng, Jingyan Dong, Etienne Menard, Placid M. Ferreira, Yonggang Huang, John A. Rogers

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

33 Scopus citations

Abstract

This letter describes a strategy for controlling fracture in microelectromechanical systems (MEMSs) based on the control of corner sharpness. Studies of model MEMS structures with round (radius of approximately microns), intermediate, and sharp (<10 nm) corners demonstrate the effects of corner sharpness on the concentration of applied stress. Finite-element analysis reveals that stress distributions intensify and localize as sharpness increases, and transfer printing experiments demonstrate the influence of stress concentration on breakability.

Original language	English (US)
Article number	083110
Journal	Applied Physics Letters
Volume	90
Issue number	8
DOIs	https://doi.org/10.1063/1.2679072
State	Published - 2007

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.2679072

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title = "Stress focusing for controlled fracture in microelectromechanical systems",

abstract = "This letter describes a strategy for controlling fracture in microelectromechanical systems (MEMSs) based on the control of corner sharpness. Studies of model MEMS structures with round (radius of approximately microns), intermediate, and sharp (<10 nm) corners demonstrate the effects of corner sharpness on the concentration of applied stress. Finite-element analysis reveals that stress distributions intensify and localize as sharpness increases, and transfer printing experiments demonstrate the influence of stress concentration on breakability.",

author = "Meitl, {Matthew A.} and Xue Feng and Jingyan Dong and Etienne Menard and Ferreira, {Placid M.} and Yonggang Huang and Rogers, {John A.}",

note = "Funding Information: This work was supported by the U.S. Department of Energy under Grant No. DEFG02-91-ER45439, the National Science Foundation under Grant No. DMI-0328162, and a graduate fellowship from the Fannie and John Hertz Foundation to one of the authors (M.A.M.).",

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AU - Meitl, Matthew A.

AU - Feng, Xue

AU - Dong, Jingyan

AU - Menard, Etienne

AU - Ferreira, Placid M.

AU - Huang, Yonggang

AU - Rogers, John A.

N1 - Funding Information: This work was supported by the U.S. Department of Energy under Grant No. DEFG02-91-ER45439, the National Science Foundation under Grant No. DMI-0328162, and a graduate fellowship from the Fannie and John Hertz Foundation to one of the authors (M.A.M.).

PY - 2007

Y1 - 2007

N2 - This letter describes a strategy for controlling fracture in microelectromechanical systems (MEMSs) based on the control of corner sharpness. Studies of model MEMS structures with round (radius of approximately microns), intermediate, and sharp (<10 nm) corners demonstrate the effects of corner sharpness on the concentration of applied stress. Finite-element analysis reveals that stress distributions intensify and localize as sharpness increases, and transfer printing experiments demonstrate the influence of stress concentration on breakability.

AB - This letter describes a strategy for controlling fracture in microelectromechanical systems (MEMSs) based on the control of corner sharpness. Studies of model MEMS structures with round (radius of approximately microns), intermediate, and sharp (<10 nm) corners demonstrate the effects of corner sharpness on the concentration of applied stress. Finite-element analysis reveals that stress distributions intensify and localize as sharpness increases, and transfer printing experiments demonstrate the influence of stress concentration on breakability.

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Stress focusing for controlled fracture in microelectromechanical systems

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