Stress focusing for controlled fracture in microelectromechanical systems

Matthew A. Meitl*, Xue Feng, Jingyan Dong, Etienne Menard, Placid M. Ferreira, Yonggang Huang, John A. Rogers

*Corresponding author for this work

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

This letter describes a strategy for controlling fracture in microelectromechanical systems (MEMSs) based on the control of corner sharpness. Studies of model MEMS structures with round (radius of approximately microns), intermediate, and sharp (<10 nm) corners demonstrate the effects of corner sharpness on the concentration of applied stress. Finite-element analysis reveals that stress distributions intensify and localize as sharpness increases, and transfer printing experiments demonstrate the influence of stress concentration on breakability.

Original languageEnglish (US)
Article number083110
JournalApplied Physics Letters
Volume90
Issue number8
DOIs
StatePublished - Mar 1 2007

Fingerprint

sharpness
microelectromechanical systems
stress concentration
printing
stress distribution
radii

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Meitl, Matthew A. ; Feng, Xue ; Dong, Jingyan ; Menard, Etienne ; Ferreira, Placid M. ; Huang, Yonggang ; Rogers, John A. / Stress focusing for controlled fracture in microelectromechanical systems. In: Applied Physics Letters. 2007 ; Vol. 90, No. 8.
@article{43fbfe4186d3418e9d65aac1acc5974a,
title = "Stress focusing for controlled fracture in microelectromechanical systems",
abstract = "This letter describes a strategy for controlling fracture in microelectromechanical systems (MEMSs) based on the control of corner sharpness. Studies of model MEMS structures with round (radius of approximately microns), intermediate, and sharp (<10 nm) corners demonstrate the effects of corner sharpness on the concentration of applied stress. Finite-element analysis reveals that stress distributions intensify and localize as sharpness increases, and transfer printing experiments demonstrate the influence of stress concentration on breakability.",
author = "Meitl, {Matthew A.} and Xue Feng and Jingyan Dong and Etienne Menard and Ferreira, {Placid M.} and Yonggang Huang and Rogers, {John A.}",
year = "2007",
month = "3",
day = "1",
doi = "10.1063/1.2679072",
language = "English (US)",
volume = "90",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "8",

}

Stress focusing for controlled fracture in microelectromechanical systems. / Meitl, Matthew A.; Feng, Xue; Dong, Jingyan; Menard, Etienne; Ferreira, Placid M.; Huang, Yonggang; Rogers, John A.

In: Applied Physics Letters, Vol. 90, No. 8, 083110, 01.03.2007.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Stress focusing for controlled fracture in microelectromechanical systems

AU - Meitl, Matthew A.

AU - Feng, Xue

AU - Dong, Jingyan

AU - Menard, Etienne

AU - Ferreira, Placid M.

AU - Huang, Yonggang

AU - Rogers, John A.

PY - 2007/3/1

Y1 - 2007/3/1

N2 - This letter describes a strategy for controlling fracture in microelectromechanical systems (MEMSs) based on the control of corner sharpness. Studies of model MEMS structures with round (radius of approximately microns), intermediate, and sharp (<10 nm) corners demonstrate the effects of corner sharpness on the concentration of applied stress. Finite-element analysis reveals that stress distributions intensify and localize as sharpness increases, and transfer printing experiments demonstrate the influence of stress concentration on breakability.

AB - This letter describes a strategy for controlling fracture in microelectromechanical systems (MEMSs) based on the control of corner sharpness. Studies of model MEMS structures with round (radius of approximately microns), intermediate, and sharp (<10 nm) corners demonstrate the effects of corner sharpness on the concentration of applied stress. Finite-element analysis reveals that stress distributions intensify and localize as sharpness increases, and transfer printing experiments demonstrate the influence of stress concentration on breakability.

UR - http://www.scopus.com/inward/record.url?scp=33847216124&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33847216124&partnerID=8YFLogxK

U2 - 10.1063/1.2679072

DO - 10.1063/1.2679072

M3 - Article

VL - 90

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 8

M1 - 083110

ER -