Stress focusing for controlled fracture in microelectromechanical systems

Matthew A. Meitl*, Xue Feng, Jingyan Dong, Etienne Menard, Placid M. Ferreira, Yonggang Huang, John A. Rogers

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

32 Scopus citations

Abstract

This letter describes a strategy for controlling fracture in microelectromechanical systems (MEMSs) based on the control of corner sharpness. Studies of model MEMS structures with round (radius of approximately microns), intermediate, and sharp (<10 nm) corners demonstrate the effects of corner sharpness on the concentration of applied stress. Finite-element analysis reveals that stress distributions intensify and localize as sharpness increases, and transfer printing experiments demonstrate the influence of stress concentration on breakability.

Original languageEnglish (US)
Article number083110
JournalApplied Physics Letters
Volume90
Issue number8
DOIs
StatePublished - 2007

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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