Stress generation mechanisms in carbon thin films grown by ion-beam deposition

Keyphrases

• Stress Generation 100%
• Ion Beam Assisted Deposition 100%
• Compressive Stress 100%
• Carbon Thin Film 100%
• Generation Mechanism 100%
• Three-dimensional (3D) 50%
• Molecular Dynamics Simulation 50%
• Steady State 50%
• In Films 50%
• Residual Stress 50%
• Analytical Model 50%
• Kinetic Energy 50%
• Micro-electro-mechanical Systems 50%
• Competing Mechanisms 50%
• Film Microstructure 50%
• Film Stress 50%
• Subplantation 50%
• Atomic Stress 50%
• Ion Beam Machining 50%

Material Science

• Ion Beam Deposition 100%
• Film 100%
• Thin Films 100%
• Machining 25%
• Residual Stress 25%
• Microelectromechanical System 25%

Engineering

• Thin Films 100%
• Compressive Stress 66%
• Residual Stress 33%
• Microelectromechanical System 33%
• Analytical Model 33%