Stretchable and foldable silicon integrated circuits

Dae Hyeong Kim, Jong Hyun Ahn, Mook Choi Won, Hoon Sik Kim, Tae Ho Kim, Jizhou Song, Yonggang Y. Huang, Zhuangjian Liu, Chun Lu, John A. Rogers

Research output: Contribution to journalArticle

1071 Scopus citations

Abstract

We have developed a simple approach to high-performance, stretchable, and foldable integrated circuits. The systems integrate inorganic electronic materials, including aligned arrays of nanoribbons of single crystalline silicon, with ultrathin plastic and elastomeric substrates. The designs combine multilayer neutral mechanical plane layouts and "wavy" structural configurations in silicon complementary logic gates, ring oscillators, and differential amplifiers. We performed three-dimensional analytical and computational modeling of the mechanics and the electronic behaviors of these integrated circuits. Collectively, the results represent routes to devices, such as personal health monitors and other biomedical devices, that require extreme mechanical deformations during installation/use and electronic properties approaching those of conventional systems built on brittle semiconductor wafers.

Original languageEnglish (US)
Pages (from-to)507-511
Number of pages5
JournalScience
Volume320
Issue number5875
DOIs
StatePublished - Apr 25 2008

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ASJC Scopus subject areas

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Cite this

Kim, D. H., Ahn, J. H., Won, M. C., Kim, H. S., Kim, T. H., Song, J., Huang, Y. Y., Liu, Z., Lu, C., & Rogers, J. A. (2008). Stretchable and foldable silicon integrated circuits. Science, 320(5875), 507-511. https://doi.org/10.1126/science.1154367