STRINGS, LOOPS AND PYRAMIDS - BUILDING BLOCKS FOR MICROSTRUCTURES.

H. H. Busta; A. D. Feinerman; J. B. Ketterson; R. D. Cueller

STRINGS, LOOPS AND PYRAMIDS - BUILDING BLOCKS FOR MICROSTRUCTURES.

H. H. Busta^*, A. D. Feinerman, J. B. Ketterson, R. D. Cueller

^*Corresponding author for this work

Physics and Astronomy

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

By combining the selective deposition of tungsten on silicon with micromatching techniques, several microelectronic devices have been developed. These include ultrathin tungsten strings with cross sections ranging from 300 angstrom multiplied by 300 angstrom to 600 angstrom multiplied by 2000 angstrom, tungsten loops, and tungsten-cladded pyramids. The fabrication of these structures is described, and their applications are indicated.

Original language	English (US)
Title of host publication	Unknown Host Publication Title
Publisher	IEEE
State	Published - Dec 1 1987

ASJC Scopus subject areas

Engineering(all)

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Cite this

@inproceedings{b4e33482722b4621909c0ea76db01090,

title = "STRINGS, LOOPS AND PYRAMIDS - BUILDING BLOCKS FOR MICROSTRUCTURES.",

abstract = "By combining the selective deposition of tungsten on silicon with micromatching techniques, several microelectronic devices have been developed. These include ultrathin tungsten strings with cross sections ranging from 300 angstrom multiplied by 300 angstrom to 600 angstrom multiplied by 2000 angstrom, tungsten loops, and tungsten-cladded pyramids. The fabrication of these structures is described, and their applications are indicated.",

author = "Busta, {H. H.} and Feinerman, {A. D.} and Ketterson, {J. B.} and Cueller, {R. D.}",

year = "1987",

month = dec,

day = "1",

language = "English (US)",

booktitle = "Unknown Host Publication Title",

publisher = "IEEE",

}

TY - GEN

T1 - STRINGS, LOOPS AND PYRAMIDS - BUILDING BLOCKS FOR MICROSTRUCTURES.

AU - Busta, H. H.

AU - Feinerman, A. D.

AU - Ketterson, J. B.

AU - Cueller, R. D.

PY - 1987/12/1

Y1 - 1987/12/1

N2 - By combining the selective deposition of tungsten on silicon with micromatching techniques, several microelectronic devices have been developed. These include ultrathin tungsten strings with cross sections ranging from 300 angstrom multiplied by 300 angstrom to 600 angstrom multiplied by 2000 angstrom, tungsten loops, and tungsten-cladded pyramids. The fabrication of these structures is described, and their applications are indicated.

AB - By combining the selective deposition of tungsten on silicon with micromatching techniques, several microelectronic devices have been developed. These include ultrathin tungsten strings with cross sections ranging from 300 angstrom multiplied by 300 angstrom to 600 angstrom multiplied by 2000 angstrom, tungsten loops, and tungsten-cladded pyramids. The fabrication of these structures is described, and their applications are indicated.

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UR - http://www.scopus.com/inward/citedby.url?scp=0023603964&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0023603964

BT - Unknown Host Publication Title

PB - IEEE

ER -